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MEMS SENSORS

Distortion-free probes of electric field

Nature Electronics volume 1, pages 10–11 (2018)Cite this article

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A microfabricated silicon device can locally measure the intensity of an electric field without any significant field distortion.

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Fig. 1: MEMS sensors for measuring electric field strength.

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Authors and Affiliations

  1. Department of Information Engineering, University of Brescia, Brescia, Italy

    Vittorio Ferrari

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  1. Vittorio Ferrari
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Correspondence to Vittorio Ferrari.

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Ferrari, V. Distortion-free probes of electric field. Nat Electron 1, 10–11 (2018). https://doi.org/10.1038/s41928-017-0013-9

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