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Stiction reduction processes for surfacemicromachines

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Abstract

We present a review of surface micromachining technology with anemphasis on polycrystalline silicon (polysilicon)microstructures. The problems of release-related and in-usestiction are then introduced along with a brief review ofvarious approaches developed for reducing them. These includesurface roughening and chemical modification of the siliconsurfaces. The constraints that post-release back-end processessuch as assembly and packaging place on surface treatments aredescribed in general. Finally, we briefly outline some of theimportant scientific and technological issues that remain to be clarified in stiction phenomena in micromechanical structures.

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Authors
  1. R. Maboudian
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  2. R.T. Howe
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Maboudian, R., Howe, R. Stiction reduction processes for surfacemicromachines. Tribology Letters 3, 215–221 (1997). https://doi.org/10.1023/A:1019185206471

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