Skip to main content
Log in

Cross-section TEM and Optical Characterization of Porous Silicon Multilayer Stacks

  • Published:
Journal of Materials Science Letters

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

References

  1. L. T. Canham, Appl. Phys. Lett. 57 (1990) 1046.

    Google Scholar 

  2. N. Koshida and H. Koyama, ibid. 60 (1992) 347.

    Google Scholar 

  3. M. G. Berger, M. ThÖnissen, R. Arensfischer, H. MÜnder, H. LÜth, M. Arntzen and W. Theiß, Thin Solid Films 255 (1995) 313.

    Google Scholar 

  4. M. G. Berger, C. Dieker, M. ThÖnissen, L. Vescan, H. LÜth, H. MÜnder, W. Theiβ, M. Wernke and P. Grosse, J. Phys. D, Appl. Phys. 27 (1994) 1333.

    Google Scholar 

  5. ST. Frohnhoff, M. G. Berger, M. ThÖnissen, C. Dieker, L. Vescan, H. MÜnder and H. LÜth, Thin Solid Films 255 (1995) 59.

    Google Scholar 

  6. A. Halimaoui, in “Porous silicon science and technology”, edited by J.-C. Vial and J. Derrien (Springer-Verlag, Berlin, 1995) p. 33.

    Google Scholar 

  7. A. Barna, Mater. Res. Soc. Symp. Proc. 254 (1991).

  8. V. Lehmann, in “Optical properties of low dimensional silicon structures”, edited by D. C. Bensahel, L. T. Canham and S. Ossiccini (Kluwer Academic Publishers, Dordrecht, 1993) p. 1.

    Google Scholar 

  9. M. H. Ludwig, Crit. Rev. Solid State Mater. Sci. 21 (1996) 265.

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Martín-Palma, R.J., Herrero, P., Guerrero-Lemus, R. et al. Cross-section TEM and Optical Characterization of Porous Silicon Multilayer Stacks. Journal of Materials Science Letters 17, 845–847 (1998). https://doi.org/10.1023/A:1006654926348

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/A:1006654926348

Keywords

Navigation