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Thermodynamics of Silicon Nitride. Standard molar enthalpy of formation of amorphous Si3N4 at 298.15 K

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Abstract

The standard molar enthalpy of formation Δf H m 0=–760±12 kJ for amorphous silicon nitride a-Si3N4 has been determined from fluorine combustion calorimetry measurements of the massic energy of the reaction: a-Si3N4(s)+6F2(g)=3SiF4(g)+2N2(g). This value combined with Δf H m 0= –828.9±3.4 kJ for a-Si3N4 indicates that determined for the first time molar enthalpy change for the transition from amorphous to α-crystalline form Δtrs H m 0=69±13 kJ is very evident, in spite of its large uncertainty range resulting from impurity corrections.

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  1. Institute of Physical Chemistry of the Polish Academy of Sciences, ul. Kasprzaka 44/52, 01-224, Warsaw, Poland

    I. Tomaszkiewicz

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  1. I. Tomaszkiewicz
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Tomaszkiewicz, I. Thermodynamics of Silicon Nitride. Standard molar enthalpy of formation of amorphous Si3N4 at 298.15 K. Journal of Thermal Analysis and Calorimetry 65, 425–433 (2001). https://doi.org/10.1023/A:1012472801483

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