Abstract
TiC, TiB2, and super hard TiBCN coatings were successfully deposited by ion beam assisted, electron beam-physical vapor deposition. Titanium, titanium diboride, and carbon (through tungsten) were co-evaporated by energetic electron beams while simultaneously bombarding the substrates with varying ionized gas ratios of nitrogen and argon to obtain super hard TiBCN coatings. The hardness of the TiBCN coating was reported to be equivalent to a soft diamond like carbon film. The adhesion was determined to be greater than 50 N. The hardness, grain size, structure, morphology, crystallographic texture and degree of stress within the coatings were determined using a variety of characterization methods including Vicker's hardness measurements, electron probe microanalysis (EPMA), optical microscopy (OM), scanning electron microscopy (SEM), and X-ray diffraction. The author is not aware of previous TiBCN coatings being deposited by this method.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
J. E. SUNDGREEN and L. HULTMAN, in Material and Processes for Surface and Interface Engineering, edited by Y. Pauleau (Kluwer Academic Publishers, The Netherlands, 1995) p. 453.
B. RAUSHENBACK and K. HELMING, Nucle. Instrum. Methods. Phys. Res. B 42 (1989) 216.
C. QUAEYHAEGENS, G. KNUYT, J. D'HAEN and L. STALS, Thin Solid Films 258 (1995) 170.
W. ENSINGER, Nucle. Instrum. Methods. Phys. Res.B 106 (1995) 142.
G. KNUYT, C. QUAEYHAEGENS, J. D'HAEN and L. STALS, Thin Solid Films 258 (1995) 159.
U. C. OH and J. H. JE, J. Appl. Phys. 74 (1993) 1692.
Y. ANDOH, K. OGAA, H. YAMAKI and S. SAKAI, Nucle. Instrum. Methods. Phys. Res. B 39 (1989) 158.
L. HULTMAN, J. E. SUNGREN, J. E. GREENE, D. N. BERGSTROM and I. PETROV, J. Appl. Phys. 78 (1995) 5395.
H. HOLLECK and V. SCHIER, Surface and Coatings Technology 76/77 (1995) 328.
H. HOLLECK, in Surface Engineering: Science and Technology I, edited by A. Kumar et al. (The Minerals, Metals and Materials Society, Warrendale, PA, 1999) p. 207.
H. DENG, J. CHEN, R. B. INTURI and J. A. BARNARD, Surface and Coatings Technology 76/77 (1995) 609.
A. KUMAR and M. SHAMSUZZOHA, in Surface Engineering: Science and Technology I, edited by A. Kumar et al. (The Minerals, Metals and Materials Society, Warrendale, PA, 1999) p. 165.
B. A. MOVCHAN, A. V. DEMCHISHIN, G. G. BADILENKO, R. F. BUNSHAH, C. SANS, C. DESHPANDEY and H. J. DOERR, Thin Solid Films 97 (1982) 215.
W. ZHANG, B. XU, S. MA, Q. XUE and X. ZHANG, in Surface Engineering: Science and Technology I, edited by A. Kumar et al. (The Minerals, Metals and Materials Society, Warrendale, PA, 1999) p. 21.
K. J. MA, A. BLOYCE and T. BELL, Surface and Coatings Technology 76/77 (1995) 297.
D. E. WOLFE and J. SINGH,ibid. 124 (2000) 142.
Idem., J. Mater. Sci. 34 (1999) 2997.
Idem., ibid. 33 (1998) 3677.
H. HOLLECK and M. LAHRES, Materials Science and Engineering A 140 (1991) 609.
D. E. WOLFE, Thesis 2001dWolfe DE, Penn State University, 2001.
D. ZONG, E. SUTTER, J. J. MOORE, G. G. W. MUSTOE, E. A. LEVASHOV and J. DISAM, Thin Solid Films 398/399 (2001) 320.
M. STUBER, V. SCHIER and H. HOLLECK, Surface Coatings Technology 74/75 (1995) 833.
W. ENSINGER, Nucl. Instru. Meth. Phys. Res. B 106 (1995) 142.
B. D. CULLITY, “Elements of X-ray Diffraction” (Addison-Wesley Publishing, Reading, MA, 1978) p. 102.
K. BEWILOGUA, H. J. HEINITZ, R. RAU and S. SCHULZE, Thin Solid Films 167 (1988) 233.
S. K. SHARMA and J. P. MORLEVAT, ibid. 156 (1988) 307.
T. ARAI and S. MORIYAMA, ibid. 259 (1995) 174.
A. AUBERT, J. DANROC, A. GAUCHER and J. P. TERRAT, ibid. 126 (1985) 61.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Wolfe, D.E., Singh, J. Synthesis and characterization of TiBCN coatings deposited by ion beam assisted, co-evaporation electron beam-physical vapor deposition (EB-PVD). Journal of Materials Science 37, 3777–3787 (2002). https://doi.org/10.1023/A:1016533913894
Issue Date:
DOI: https://doi.org/10.1023/A:1016533913894