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Condensation and Densification Mechanism of Sol-Gel TiO2 Layers at Low Temperature

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Abstract

Titanium dioxide films were prepared by the sol-gel process at low temperature under dry and humid conditions. The effect of solution parameters on the solution reactivity was studied. Layers deposited on silicon wafers as well as on organic substrates were characterized by Fourier Transform infrared spectoscopy and ellipsometry. Their mechanical quality was also tested. Results reported in this paper demonstrate the influence of the temperature and humidity during post-deposition treatment on the network development and densification. A suitable balance between both mechanisms led to hard and flexible coatings compatible with the thermal expansion of polymer substrates.

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References

  1. M. Langlet and J.C. Joubert, European Patent 0486393 A1(1991).

  2. C. Vautey, M. Burgos, and M. Langlet, Thin Solid Films 347,184 (1999).

    Google Scholar 

  3. M. Kallala, C. Sanchez, and B. Cabane, J. Non-Cryst.Solids 147&148, 189 (1992).

    Google Scholar 

  4. A. Matsuda, T. Kogure, Y. Matsuno, S. Katayama, T. Tsuno, N. Tohge, and T. Minami, J. Amer. Ceram. Soc. 76, 2899 (1993).

    Google Scholar 

  5. A. Matsuda, Y. Matsuno, S. Katayama, T. Tsuno, N. Tohge, and T. Minami, J. Ceram. Soc. JPN. 102, 330 (1994).

    Google Scholar 

  6. H. Imai, H. Morimoto, A. Tominaga, and H. Hirashima, J. Sol-Gel Sci. and Tech.10, 45 (1997).

    Google Scholar 

  7. H.G. Floch and P.F. Belleville, Sol-Gel Optics II (J.D.Mackenzie, SPIE Proc., Bellingham, W.A., 1992), Vol. 1758, p. 135.

    Google Scholar 

  8. M. Burgos and M. Langlet, Thin Solid Films 349, 19 (1999).

    Google Scholar 

  9. S. Doeuff, M. Henry, C. Sanchez, and J. Livage, J. of Non-crystalline Solids 89, 206 (1987).

    Google Scholar 

  10. C. Sanchez, J. Livage, M. Henry, and F. Babonneau,J. of Non-crystalline Solids 100, 65 (1988).

    Google Scholar 

  11. Y. Takahashi and Y. Matsuoka, J. of Mat. Science 23, 2259 (1988).

    Google Scholar 

  12. M. Langlet, D. Walz, P. Marage, and J.C. Joubert, Thin Solid Films 221, 44 (1992).

    Google Scholar 

  13. M.J. Van Bommels and T.N.M. Bernards, J. of Sol-Gel Science and Technology8, 459 (1997).

    Google Scholar 

  14. B.L. Bischoff and M.A. Anderson, Chem. Mat.7, 1772 (1995).

    Google Scholar 

  15. C.J. Brinker, R. Sehgal, S.L. Hietala, R. Deshpande, D.M. Smith, D. Loy, and C.S. Ashley, J. of Membrane Science 94, 85 (1994).

    Google Scholar 

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Authors and Affiliations

  1. INPG-ENSPG, Laboratoire des Matériaux et du Génie Physique, UMR 5628 CNRS, BP 46, 38402, Saint Martin d'Hères, France

    M. Burgos & M. Langlet

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  1. M. Burgos
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  2. M. Langlet
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Correspondence to M. Langlet.

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Burgos, M., Langlet, M. Condensation and Densification Mechanism of Sol-Gel TiO2 Layers at Low Temperature. Journal of Sol-Gel Science and Technology 16, 267–276 (1999). https://doi.org/10.1023/A:1008773404931

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