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Automation of Technological Equipment for Obtaining Multilayer Structures in an Ultrahigh Vacuum

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Abstract

Automation of a complex of technological equipment for obtaining thin films and multilayer structures of semiconductor and magnetic materials in an ultrahigh vacuum is described. PC-based software and hardware units for controlling the ultrahigh vacuum system and automatically controlling the evaporators have been developed. The complex is equipped with analytical facilities for in situ monitoring of the parameters of the obtained structures using the techniques of high-energy electron diffraction, laser ellipsometry, and Auger electron spectroscopy.

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Authors and Affiliations

  1. Kirenskii Institute of Physics, Siberian Division, Russian Academy of Sciences, Akademgorodok, Krasnoyarsk, 660036, Russia

    S. N. Varnakov, S. G. Ovchinnikov & M. M. Korshunov

  2. Reshetnev Siberian State Aerospace University, pr. im. Gazety Krasnoyarskii rabochii 31, Krasnoyarsk, 660014, Russia

    A. A. Lepeshev & A. S. Parshin

  3. Czech Technical University, ul. Zikova 4, Prague 6, 16636, Czech Republic

    P. Nevoral

Authors
  1. S. N. Varnakov
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  2. A. A. Lepeshev
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  3. S. G. Ovchinnikov
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  4. A. S. Parshin
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  5. M. M. Korshunov
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  6. P. Nevoral
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Varnakov, S.N., Lepeshev, A.A., Ovchinnikov, S.G. et al. Automation of Technological Equipment for Obtaining Multilayer Structures in an Ultrahigh Vacuum. Instruments and Experimental Techniques 47, 839–843 (2004). https://doi.org/10.1023/B:INET.0000049709.08368.3e

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  • DOI: https://doi.org/10.1023/B:INET.0000049709.08368.3e

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