Abstract
Sputter deposited Ta thin films make excellent superconducting transition edge temperature sensors. Depending on film thickness, their transition temperature, Tc, ranges from 4.4K to as least as low as 0.5K. A figure of merit of 50K−1 is easily achieved. The films are mechanically extremely strong, and at room temperature show minimal aging. Using a simple heat treatment technique, Tc can be tuned to the desired operating range.
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REFERENCES
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Mohazzab, M., Mulders, N., Nash, A. et al. Tantalum Thin-Film Superconducting Transition Edge Thermometers. Journal of Low Temperature Physics 121, 821–824 (2000). https://doi.org/10.1023/A:1017589611451
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DOI: https://doi.org/10.1023/A:1017589611451