Abstract
Sol-gel is a promising deposition technique for the fabrication of silica-on-silicon photonic components. Silica-titania compositions provide large index differences, and thus strong mode confinement, and are suitable hosts for Er-doped optical amplifiers. We have developed channel waveguides based on phosphosilicate strip loads over high index titania-doped guiding layers. Here we demonstrate that low propagation loss (0.3 dB/cm) can be obtained in such guides at optical communication wavelengths. Alumina co-doped guiding layers are shown to inhibit OH retention without causing titania segregation, and reduced humidity during spinning is shown to be necessary to achieve low propagation losses.
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Yeatman, E., Pita, K., Ahmad, M. et al. Strip-Loaded High-Confinement Waveguides for Photonic Applications. Journal of Sol-Gel Science and Technology 13, 517–521 (1998). https://doi.org/10.1023/A:1008662404081
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DOI: https://doi.org/10.1023/A:1008662404081