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Yang, W.J., Auh, K.H., Li, C. et al. Microstructure characteristics of diamond-like nanocomposite (DLN) film by thermally activated chemical vapor deposition. Journal of Materials Science Letters 19, 1649–1651 (2000). https://doi.org/10.1023/A:1006766110606
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DOI: https://doi.org/10.1023/A:1006766110606