Rapid communicationInfluence of Si on the target oxide poisoning during reactive arc evaporation of (Al,Cr)2O3 coatings
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Funding
The financial support by the Austrian Federal Ministry of Economy, Family and Youth and the National Foundation for Research, Technology and Development is gratefully acknowledged. We also thank for the financial support of Plansee Composite Materials GmbH and OC Oerlikon Balzers AG. Further on we want to acknowledge the University Service Centre for Transmission Electron Microscopy (USTEM) at the Vienna University of Technology for their support. This work has been additionally supported by
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