Ablation of silica glass using pulsed laser plasma soft X-rays
References (17)
- et al.
Microelectron. Eng.
(1996) - et al.
At. Data Nucl. Data Tables
(1993) - et al.
J. Vac. Sci. Technol. B
(1992) - et al.
J. Vac. Sci. Technol. B
(1994) - et al.
J. Vac. Sci. Technol. B
(1991) - et al.
Electron. Lett.
(1986) - et al.
Appl. Phys. Lett.
(1993) - et al.
Appl. Phys. Lett.
(1995)
There are more references available in the full text version of this article.
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