Evolution of surface width in electrochemical nucleation and growth

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Abstract

The evolution of surface width during growth of copper islands is studied in the kinetic regime, allowing control of island shape as well as island density. We show that film roughness at island coalescence is determined by island density, island shape, and the island growth kinetics. The connection between the kinetics of island growth and film growth provides the scientific basis for control of surface roughness.

Introduction

The ability to control roughness is often critically important in the deposition of thin films and nanostructures. In electrodeposition, various approaches have been developed to control surface roughness, for example by pulsed deposition or the addition of chemical additives, however, the evolution of surface roughness remains poorly understood. Here we report on the evolution of surface roughness for copper electrodeposition on ruthenium oxide, from isolated island growth to continuous film growth. The small nucleation potential for this system allows us to access the kinetic growth regime and hence control island shape and island density.

Section snippets

Disk shaped islands

Fig. 1a shows hexagonal disk-shaped copper islands after 100 s in sulfate solution at −64 mV (vs. Cu2+/Cu). The islands have a (111) surface normal and a random in-plane orientation [1], [2]. The island density remains constant after 20 s when nucleation is finished. Three growth regimes can be identified (Fig. 1b): (i) isolated island growth (<500 s), (ii) island coalescence (500–2000 s), and (iii) continuous film growth (>2000 s).

To analyze the evolution of surface roughness we use scaling

Conclusions

The relationship between island growth and film roughness is complex, depending on island density, island shape (aspect ratio), and the island growth kinetics. The roughness at island coalescence is given by wfilm=Atcβloc (Fig. 3a), where A, tc, and βloc can be related to deposition parameters. The pre-factor A is dictated by island shape (aspect ratio) (see Fig. 3b), and is hence dependent on solution chemistry (local adsorption). The time to island coalescence tc is largely dependent on the

Acknowledgements

The authors gratefully acknowledge support from NSF (grant CHE-0905869).

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