Femtosecond laser-induced periodic surface nanostructuring of sputtered platinum thin films
Introduction
In the last decade, Laser-Induced Periodic Surface Structures (LIPSS) have attracted increased research attention because of their applications in surface hydrophobic/hydrophilic properties [1], friction reduction [2], [3], control of the surface reflection [4], control of the cell growth direction [5], or Surface-Enhanced Raman Spectroscopy [6]. LIPSS have been induced in a wide variety of materials by pulsed lasers in the nanosecond (ns) to femtosecond (fs) regimes [3], [7], [8], [9], [10], [11], [12], [13], [14], [15], [16], [17], [18], [19], [20]. Two distinct types of LIPSS have been identified so far: Low Spatial Frequency LIPSS (LSFL) and High Spatial Frequency LIPSS (HSFL). Their orientations can be either parallel or perpendicular to the incident laser beam polarization, depending both on laser irradiation parameters and material properties [12], [19]. LSFL have a spatial period close to or slightly smaller than the irradiation laser wavelength. Their formation is considered a result of the interference between the incident laser beam and surface-scattered waves [21], [22] or Surface Plasmon Polaritons (SPP) [15], [23]. HSFL have a spatial period that is much smaller than the laser wavelength. Several theories have been proposed for HSFL formation mechanisms: second harmonic generation (SHG) [10], [12], [24], self-organization [25], or interference with modification of the optical properties during laser processing [26]. However, none of these theories gives a complete explanation of LIPSS formation; their formation is still debated. Consequently, further investigations on the resulting LIPSS on different materials and under different irradiation conditions can help to better understand their formation mechanism. LIPSS have generally been identified in the femtosecond laser regime on bulk materials, semiconductors [11], [15], dielectrics [17], [27] and metals [16], [23], [27], [28], [29], [30]. Among metallic materials, platinum is of particular interest due to its use as contact electrode in microsensing applications or as chemical catalyst, where high surface-to-volume ratio may lead to an increased sensitivity and/or enhanced performance [23]. The formation of LIPSS on bulk platinum has been already studied by other groups [23], [28], [29], [30]. These authors have reported LSFL perpendicularly oriented to the laser beam polarization with periods varying from 0.55 to 0.69 μm depending on the irradiation conditions. Table 1 provides a summary of the obtained LIPSS on this material, which includes the most relevant process parameters and the period and orientation of the resulting structures.
LIPSS formation on thin metal films instead has been less explored, although is getting increased interest in recent years [20], [31], [32]. The work here presented is centered on the experimental observation of LIPSS in Pt thin films under ultrafast laser pulses.
Section snippets
Micro-nanomachining setup
A direct-write femtosecond laser micro-nanomachining tool was used for LIPSS experiments. A laser system consisting of a Ti:Sapphire mode-locked oscillator and a regenerative amplifier was used to generate 100 fs pulses at a central wavelength of 800 nm with a 1 kHz repetition rate. The pulse energy was adjusted with a two step setup: a constant attenuator consisting of several neutral density filters and a variable attenuator formed by a half-wave plate and a low dispersion polarizer. The 12
Effect of laser fluence and number of applied pulses
The most representative topographies obtained with this experimental set-up are shown in Fig. 2. These patterns are characterized by the shape, period (Λ) and orientation with respect to the incident laser beam polarization. Perpendicular LSFL, parallel HSFL and non-periodic nanostructures are found for the range of laser fluence and scan speeds tested.
At fluences of 38 mJ cm−2, a scan speed of 0.1 mm s−1 (100 pulses) was required to start surface texturing (Fig. 2a); no evidence of material
Discussion
In order to determine the physical mechanism behind Pt thin film surface nanostructuring, we compare our experimental results with those obtained by other groups as well as with different models discussed in literature.
The classical theory or efficacy factor theory [8] considers the interference between the incident laser beam and the scattered light as the possible explanation of the periodic grating generation. Taking into account this theory and supposing a constant refractive index, the
Conclusions
Direct nanostructuring of sputtered Pt thin films through femtosecond laser irradiation has been demonstrated for a wide range of process parameters giving rise to different types of nanostructures. Two different modifications regimes have been established for the formation of nanostructures: (a) a high-fluence regime in which random nanostructures are obtained for a low number of irradiation pulses and LSFL appear as the number of pulses increases and (b) a low-fluence regime in which HSFL are
Acknowledgements
This work was funded by the Basque Government within the framework of the Etortek Program (IE14-391).
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