Structural properties of metastable Cu-Mo solid solution thin films synthesized by magnetron sputtering

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    The elemental distributions of Cu, Si, and Mo were shown by EDS mapping (Fig. 3c) (see Supplementary file S1 and S2 for EDS line analysis), indicating around 150–350 nm Mo content increases at the interface. Previous studies on phase transformation revealed that formation of a metastable CuMo solid solution under non-equilibrium conditions is possible [21–23]. This finding supports the experimental observation of this study (S1 and S2).

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