Nanoreplication in polymers using hot embossing and injection molding

Abstract

With polymer molding techniques, it is possible to fabricate nanostructures with a replication fidelity of 25 nanometers. Both hot embossing and injection molding can be used, and cycle times of down to 4 sec can be achieved in a CD injection molding process. The resolution is far below the structure size found today in compact disc memory media. The master structures are produced by electron beam lithography and subsequent dry etching.