Application of iterative path revision technique for laser cutting with controlled fracture

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Abstract

Laser cutting using the controlled fracture technique has great potential to be employed for the ceramic substrate machining. The heat produced on the surface of a ceramic substrate by the laser separates the substrate controllably along the moving path of the laser beam. Because the extension of the breaking frontier is lager than the movement of the laser spot, the actual fracture trajectory deviates from the desired trajectory when cutting a curve or cutting an asymmetrical straight line. To eliminate this deviation, the iterative learning control method is introduced to obtain the optimal laser beam movement path. The fracture contour image is grabbed by a CCD camera after laser cutting completion. A new image processing system is proposed to detect the deviation between the desired cutting path and the actual fracture trajectory. The laser-movement path for the next trial can then be determined according to the iterative path revision algorithm. The actual fracture trajectory converging to the desired cutting path is assured after a few path revisions. The experimental materials used in these experiments are alumina ceramics and the laser source is CO2 laser. The proposed system can achieve a machining precision of about 0.1 mm.

Introduction

The laser cutting technique with controlled fracture proposed by Lumley [1] is very important in machining brittle materials. The applied laser energy produces a mechanical stress that causes the substrate to separate along the moving path of the laser beam. This material separation is similar to a crack extension with controllable fracture growth. Lumley [1] successfully used this technique to cut brittle materials such as alumina ceramic substrate and glass using a CO2 laser. The required laser power is less than that for conventional laser evaporative cutting, or laser scribing, and the cutting speed is much higher.

Grove et al. [2] proposed a related controlled fracture method for cutting glass that used a higher cutting speed. In recent years, Kondratenko [3] and Unger and Wittenbecher [4] further investigated using a low power laser to separate glass with an additional coolant, water, which produced tensile stress along the cutting path. This improvement in the controlled fracture method has been recognized as providing good prospects for future laser cutting applications.

Tsai and Liou [5] gave an account of the fracture mechanism explaining why the material separation is controllable. They mentioned that the cutting process could be divided into three stages. The first is the initiation stage, the fracture is initiated due to the tensile stress at the specimen edge. The second is the stable growth stage where the stress near the laser spot is highly compressive. After laser passes, the plastic compressive stress is relaxed, and then induces a residual tensile stress, that makes the fracture grow from upper to lower substrate surfaces. The final stage is the unstable fracture. The stress near the crack tip is entirely tensile stress along the thickness direction making the crack extend unstably.

In the experimental results of Tsai and Liou [5], the crack tip leaves behind the laser spot and the distance between the crack tip to the laser spot is variable during the cutting process. Because the propagation of the crack tip at the cutting frontier is lager than the movement of the laser spot, the fracture trajectory deviates from the desired trajectory for cutting a curve or cutting an asymmetrical straight line. To ensure accurate splitting, the stress field must be symmetrical with the crack. For most cutting conditions the cutting path is not symmetrical and the crack extension trajectory deviates from the desired cutting path.

To diminish the deviation between the actual fracture trajectory and the desired cutting path, Tsai and Liou [6] proposed an on-line crack detection system to revise the moving path of the laser beam. During the cutting process of controlled fracture, the crack tip of the separation frontier is detected on-line using an image processing system. The distance measurement between the crack tip and the laser beam can be accomplished from the analysis of crack image processing. From this distance, the motion path compensation of the laser beam can be determined.

The method proposed by Tsai and Liou [6] must be performed within the proper environment. The bright burning due to the laser heat would influence the crack detection. Because there is a delay in on-line crack detection and the cutting speed is highly restricted, this method is not suitable for mass production. In this paper, an alternative method for eliminating the deviation between the actual fracture trajectory and the given desired cutting path is proposed. The iterative path revision technique is introduced to off-line revision of the applied laser path. The idea of path revision is based on the iterative learning control theory [7] that has been successfully applied in the trajectory control of robots.

In this paper, an image processing technique using clip operation for the contour measurement is proposed to evaluate the cutting deviation. After the first cutting, the fracture contour is measured by the image processing system. The laser path for the next operation is then revised according to the iterative learning control method. The final revised laser path can be obtained as the actual fracture trajectory converges to the desired cutting path. The final revised laser path is the optimal path that can be used in mass production.

Section snippets

Laser cutting system and specimen

The laser cutting system as shown in Fig. 1 is comprised of a CW CO2 laser, an XYZ position table, and a personal computer. The laser beam moves across the surface of the workpiece mounted on a platform that can move in the x-, y-, and z-directions. The wavelength of the CO2 laser is 10.6 μm and the minimum diameter of the focused spot is 0.127 mm. The experimental specimens used in this paper are alumina (Al2O3) ceramic substrates produced by the Kyocera company (Japan). The purity of the

Direction of crack propagation

Arimoto [7] proposed the iterative learning control theory that has been applied in the trajectory control of robots. The method uses the detected trajectory of the fore operation to modify the next operation. The iterative learning control is suitable to apply in the system in which the physical principle cannot be obtained exactly. The crack extending path is difficult to be predicted for the mixed-mode condition. The theories of direction prediction of crack propagation such as minimum

Image processing of contour measurement

An image processing technique of contour measurement with subpixel accuracy is proposed for measuring the actual fracture trajectory. The fracture trajectory of the specimen contour is obtained after cutting is completed. This trajectory is then compared with the given desired cutting path. The difference between the actual fracture trajectory and the desired cutting path must be expressed using digital information that can be processed in computer. The digital information is then sent to the

Experimental results of iterative path revision

The cutting system is comprised of three subsystems: the CO2 laser, image processing system of contour measurement and XYZ positioning table. The cutting process is shown in Fig. 9. The specimens are mounted on the positioning table platform. The specimen is placed 2 mm below the laser focal plane. The diameter of laser spot is about 0.18 mm.

After cutting completion, the specimen is picked up for contour measurement. The CCD camera grabs the fracture trajectory image. The image is then analyzed

Conclusion

An off-line learning control system of laser cutting with controlled fracture is established. The deviation between the desired cutting path and the actual fracture trajectory is successfully reduced. The geometric machining precision is about 0.1 mm.

The image processing system of contour measurement is applied to the laser cutting system. The deviation between the desired cutting path and the actual fracture trajectory can be measured using the image processing system. Iterative learning

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