Microfabricated surface plasmon sensing system

doi:10.1016/0924-4247(93)00695-Z

Sensors and Actuators A: Physical

Volume 43, Issues 1–3, May 1994, Pages 202-207

https://doi.org/10.1016/0924-4247(93)00695-Z Get rights and content

Abstract

The microfabricated surface plasmon sensor is a hybrid system that integrates optical, mechanical and electronic components. The sensor contains elements that are common to numerous electro-optical systems, creating a miniature optical bench. The microsystem elements include a single-mode optical fiber, a graded index collimating lens, a scanning rotating micro-mirror, a cavity filled with index matching fluid, and a position sensitive photodiode. The elements are both laterally and vertically aligned using multi-substrate bonding and positive component-to-component alignment.

References (6)

B. Liedberg et al.
Surface plasmon resonance for gas detection and biosensing
Sensors and Actuators
(1983)
B. Liedberg et al.
Surface plasmon resonance for gas detection and biosensing
Sensors and Actuators
(1983)
E. Kretschmann et al.
The determination of optical constants of metal by excitation of surface plasmons
Z. Phys.
(1971)

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Microfabricated surface plasmon sensing system

Abstract

Sensors and Actuators

Sensors and Actuators

The determination of optical constants of metal by excitation of surface plasmons

Z. Phys.