ARAMIS: an accelerator for research on astrophysics, microanalysis and implantation in solids

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Abstract

In this paper, we present a description of ARAMIS, the 2 MV high current implanter that we are building in our laboratory. The different parts of the machine are described with an emphasis on the original aspects of the machine. The present status of the construction is given.

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Paper presented at the Symposium on Deep Implants: Fundamentals and Applications at the E-MRS Spring Meeting, Strasbourg, May 31–June 2, 1988.

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