Achievement of ultra-high resolution by 400 kV analytical atomic-resolution electron microscopy

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Abstract

The factors for improving the resolution of conventional electron microscopes are discussed together with the physics of the formation of electron diffraction patterns and electron microscope images, and a method for obtaining images of atoms at their correct positions. The optical features of the 400 kV Analytical Atomic-Resolution Electron Microscope (AARM) installed in Osaka University are described. Some details of the energy-selecting atom resolution microscope and an on-line image processing system attached to the AARM are also discussed.

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