Representation of two-dimensional ion implantation rest distributions by Pearson distribution curves for silicon technology
References (15)
- et al.
Solid-St. Electron.
(1992) - et al.
Solid-St. Electron.
(1987) - et al.
Nucl. Instrum. Meth.
(1993) - et al.
IEE Dig. 1985/74
(1985) - et al.
J. Phys. C: Solid St. Phys.
(1986) - et al.
- et al.
J. Phys. D: Appl. Phys.
(1987)
There are more references available in the full text version of this article.
Cited by (3)
Pearson-type I distribution function for polydisperse polymer systems. Molar mass distribution
2003, Journal of Chemical Information and Computer SciencesGenerating ion implantation profiles in one and two dimensions. 1: Density functions
1996, Journal of Physics D: Applied PhysicsGenerating ion implantation profiles in one and two dimensions. 2: Depth-dependent moments and line-source responses
1996, Journal of Physics D: Applied Physics
Copyright © 1995 Published by Elsevier Ltd.