Si/transition-metal Schottky barriers: Fermi-level pinning by Si dangling bonds at interfacial vacancies

https://doi.org/10.1016/0038-1098(84)90548-9Get rights and content

Abstract

The Schottky barriers formed by deposition of transition metals on Si surfaces are explained in terms of Fermi-level pinning by Si dangling bonds that are sheltered by vacancies at Si/transition-metal-silicide interfaces.

References (36)

  • W. Mönch et al.

    Phys. Rev. Letters

    (1982)
  • P.S. Ho et al.

    Thin Solid Films

    (1981)
  • P. Vogl et al.

    J. Phys. Chem. Solids

    (1983)
  • J. Bernholc et al.

    Phys. Rev. Letters

    (1978)
  • Thin Solid Films

    (1982)

    J. Vac. Sci. Technol. XX

    (1983)
  • J. Bardeen

    Phys. Rev.

    (1947)
  • R.E. Allen et al.

    J. Vac. Sci. Technol. B

    (1983)
  • J.M. Andrews et al.

    Phys. Rev. Letters

    (1975)
  • J.L. Freeouf

    Solid State Commun.

    (1980)
  • W.E. Spicer et al.

    Phys. Rev. Letters

    (1980)
  • H.H. Wieder

    Applied Phys. Letters

    (1980)
  • R.H. Williams et al.

    J. Phys.

    (1978)
  • R.W. Grant et al.

    J. Vac. Sci. Technol.

    (1981)
  • R.E. Allen et al.

    Phys. Rev.

    (1982)
  • R.E. Allen et al.

    Solid State Commun.

    (1982)
  • J.D. Dow et al.

    J. Vac. Sci. Technol.

    (1982)
  • C.A. Mead et al.

    Phys. Rev.

    (1964)
  • P. Pianetta et al.

    Surf. Sci.

    (1978)
    H.H. Wieder

    Inst. Phys. Conf. Ser.

    (1980)
  • Cited by (51)

    • Recent advances in Schottky barrier concepts

      2001, Materials Science and Engineering: R: Reports
    • Properties of noble-metal/silicon junctions

      1992, Materials Science Reports
    View all citing articles on Scopus
    View full text