Vibrational spectra of vapor-deposited binary phosphosilicate glasses

doi:10.1016/0022-3093(76)90109-5

Journal of Non-Crystalline Solids

Volume 20, Issue 1, January 1976, Pages 83-100

https://doi.org/10.1016/0022-3093(76)90109-5 Get rights and content

Abstract

Room temperature infrared transmission spectra in the range 4000-250 cm⁻¹ of binary phosphosilicate glass (PSG) films deposited by reacting argon- or nitrogen-diluted PH₃SiH₄O₂ mixtures on heated silicon substrates at 300–400° C have been obtained across the whole composition range. In all the as-deposited binary films, an absorption at ≈1300 cm⁻¹ characteristics of the P=O vibration was found to persist, together with a couple of broad absorptions in the regions 1200-900 cm⁻¹ and 500 cm⁻¹. Using a differential infrared technique the broad feature in the higher frequency region has been resolved into two well-defined bands at ≈1100 and 970 cm⁻¹. A detailed analysis shows that the intensity variation of the differential band at ≈1100 cm⁻¹ conforms well, at least to 50 mol% P₂O₅, to a simple structural model that yields an analytic distribution of POSi linkages as a function of composition by assuming chemical mixing in the vapor-deposited P₂O₅SiO₂ system. Furthermore, the system may be written as (P=O)₂ O₃SiO₂ in order to emphasize the similarity of its coordination scheme with that of the B₂O₃SiO₂ system studied earlier. The nature of these CVD films has also been elucidated by thermal and water treatments.

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Vibrational spectra of vapor-deposited binary phosphosilicate glasses

Abstract

Solid State Electron.

Solid State Electron

Opt. Spectry.

Spectrochim. Acta

J. Phys.

J. Appl. Phys.

J. Electrochem. Soc.

Japan J. Appl. Phys.

J. Electrochem. Soc.

IBM J. Res. Develop.

J. Electrochem. Soc.

Trans. Met. Soc. AIME

IEEE Trans. Electron. Devices

J. Electrochem. Soc.

J. Electrochem. Soc.

J. Electrochem. Soc.

J. Amer. Ceram. Soc.

J. Electrochem. Soc.

J. Electrochem. Soc.

J. Electrochem. Soc.

J. Appl. Phys.

Solid State Electron.

J. Appl. Phys.

J. Electrochem. Soc.

J. Electrochem. Soc.

Phys. Stat. Sol.