Some speculations on the mechanisms of abrasive grinding and polishing
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Cited by (52)
Correlation between contact surface and friction during the optical glass polishing
2014, Applied Surface ScienceCitation Excerpt :For a constant tool pressure, the shape change can be easily found. However, this is not possible in several cases because of the tool and the workpiece shapes that are not generally the same, the roughness (overlap between the polisher and the sample asperities), the presence of the forces and the accelerations simultaneously activating on the surface to be polished [6–11]. The material removal model proposed by Savio et al. [2] shows a satisfactory estimation of the material removal as a function of the process parameters.
Single abrasive particle impingements as a benchmark to determine material removal modes in micro ultrasonic machining
2012, WearCitation Excerpt :The investigation on material removal mode in machining hard and brittle materials, whether it is in brittle mode with crack propagation or in ductile mode with plastic deformation, has been subject of interest among researchers in both macro and micro machining arenas for many years now [1–8].
An empirical approach to explain the material removal rate for copper chemical mechanical polishing
2012, Tribology InternationalCitation Excerpt :In all of the three steps, determination of the material removal rate (MRR) is very important for performing CMP process continuously. Up to now, lots of removal models and empirical expressions have been developed for demonstrating the removal mechanism of CMP [1–12]. Besides the models based on fluid mechanism, contact mechanics, and other first principles, empirical expressions represent another approach to determine the material removal rate of CMP process, although they can only be used in special conditions.
Study micromechanism of surface planarization in the polishing technology using numerical simulation method
2007, Applied Surface ScienceA novel method of composite electroplating on lap in lapping process
2007, International Journal of Machine Tools and Manufacture
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