Abstract
Molecular dynamics simulations are becoming a powerful tool for examining and predicting atomic and molecular processes in various environments. The present review showcases how molecular dynamics simulations can provide valuable insights into various processes in the fields of plasma physics, chemistry, and interactions with materials and liquids. Some notable processes include gas phase polymerization, deposition, plasma-catalysis, discharge breakdown, and vibrational excitation.
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Acknowledgements
The author wishes to warmly thank all people, either experimentalist, theoreticist or numerician, co-authors and/or colleagues, from GREMI, from France and abroad, being staff members, PhD candidates or postdoc, who contribute by running simulations or experiments and by stimulating discussions to the field of molecular dynamics simulations in plasma processing: Anne-Lise Thomman, Amaël Caillard, Jean-Marc Bauchire, Johannes Berndt, Eva Kovacevic, Olivier Aubry, Dunpin Hong, Hervé Rabat, Eric Robert, Maxime Mikikian, Lu Xie, Lucile Pentecoste, Soumya Atmane, Mathieu Mougenot, Andrea Jagodar, Sotheara Chuon, Glenn C. Otakantza-Kandjani, Gautier Tetard, Amal Allouch, Matthieu Wolff, Rui Qiu, Fanchao Ye, Jehiel Nteme-Mukunzo, William Chamorro-Coral, Vanessa Orozco-Montes, Sara Ibrahim, Seyedehsara Fazeli, Christine Charles, Rod W. Boswell, David B. Graves, Erik C. Neyts, Monica Magureanu, Corina Bradu, Magdalena Nistor, Florin Gherendi, Movaffaq Kateb, Tomas Gudmunsson, Sudeep Bhattarcharjee, Christophe Coutanceau, Khaled Hassouni, Armelle Michau, Emilie Despiau Pujo, Tatiana Itina, Germain Valverdu, Marjorie Cavarroc, and Pascal Vaudin.
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Brault, P. Practical classical molecular dynamics simulations for low-temperature plasma processing: a review. Rev. Mod. Plasma Phys. 8, 2 (2024). https://doi.org/10.1007/s41614-023-00140-5
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DOI: https://doi.org/10.1007/s41614-023-00140-5