Abstract
An accurate characterization of the microstructure is of great importance in manufacturing zeolites for their appropriate use and optimal performance. Here, an analytical methodology suitable for the complex porous structures of zeolites using focused ion beam (FIB) and scanning electron microscopy (SEM) tomography is demonstrated. For this analysis, a commercial zeolite absorbent is chosen, which is composed of a single zeolite bead filled with small internal beads, like eggs in a brood pouch. Some of the internal zeolite beads and their surrounding pore structures have been precisely reconstructed as three-dimensional (3D) image forms over the micro-scale through FIB-SEM, and the microstructural properties such as particle/pore sizes, specific volume, and surface area are numerically evaluated from the image analysis. This study describes the details of the characterization process from sample preparation to image analysis and discusses major factors influencing the results.
Similar content being viewed by others
References
Weckhuysen, B. M. and Yu, J., “Recent Advances in Zeolite Chemistry and Catalysis,” Chemical Society Reviews, Vol. 44, No. 20, pp. 7022–7024, 2015.
Chue, K., Kim, J., Yoo, Y., Cho, S., and Yang, R., “Comparison of Activated Carbon and Zeolite 13X for CO2 Recovery from Flue Gas by Pressure Swing Adsorption,” Industrial & Engineering Chemistry Research, Vol. 34, No. 2, pp. 591–598, 1995.
Jänchen, J., Ackermann, D., Stach, H., and Brösicke, W., “Studies of the Water Adsorption on Zeolites and Modified Mesoporous Materials for Seasonal Storage of Solar Heat,” Solar Energy, Vol. 76, No. 1, pp. 339–344, 2004.
Cavenati, S., Grande, C. A., and Rodrigues, A. E., “Adsorption Equilibrium of Methane, Carbon Dioxide, and Nitrogen on Zeolite 13X at High Pressures,” Journal of Chemical & Engineering Data, Vol. 49, No. 4, pp. 1095–1101, 2004.
Brandenberger, S., Kröcher, O., Tissler, A., and Althoff, R., “The State of the Art in Selective Catalytic Reduction of NOx by Ammonia Using Metal-Exchanged Zeolite Catalysts,” Catalysis Reviews, Vol. 50, No. 4, pp. 492–531, 2008.
Dong, A., Wang, Y., Tang, Y., Ren, N., Zhang, Y., et al., “Hollow Zeolite Capsules: A Novel Approach for Fabrication and Guest Encapsulation,” Chemistry of Materials, Vol. 14, No. 8, pp. 3217–3219, 2002.
Hwang, Y. K., Chang, J. S., Park, S. E., Kim, D. S., Kwon, Y. U., et al., “Microwave Fabrication of MFI Zeolite Crystals with a Fibrous Morphology and their Applications,” Angewandte Chemie International Edition, Vol. 44, No. 4, pp. 556–560, 2005.
Ma, Y., Tong, W., Zhou, H., and Suib, S. L., “A Review of Zeolite-Like Porous Materials,” Microporous and Mesoporous Materials, Vol. 37, No. 1, pp. 243–252, 2000.
Li, J., Chang, H., Ma, L., Hao, J., and Yang, R. T., “Low-Temperature Selective Catalytic Reduction of NOx with NH3 Over Metal Oxide and Zeolite Catalysts-A Review,” Catalysis Today, Vol. 175, No. 1, pp. 147–156, 2011.
Li, Y. and Yang, W., “Microwave Synthesis of Zeolite Membranes: A Review,” Journal of Membrane Science, Vol. 316, No. 1, pp. 3–17, 2008.
Wang, X., Yang, W., Tang, Y., Wang, Y., Fu, S., et al., “Fabrication of Hollow Zeolite Spheres,” Chemical Communications, No. 21, pp. 2161–2162, 2000.
Lee, W. and Prinz, F. B., “Localized Charge Transfer Reactions Near the Pt-YSZ Interfaces Using Kelvin Probe Microscopy,” Int. J. Precis. Eng. Manuf.-Green Tech., Vol. 1, No. 3, pp. 201–205, 2014.
Kim, S. K., Sung, G., Gwon, J. G., and Kim, J. H., “Controlled Phase Separation in Flexible Polyurethane Foams with Diethanolamine Cross-Linker for Improved Sound Absorption Efficiency,” Int. J. Precis. Eng. Manuf.-Green Tech., Vol. 3, No. 4, pp. 367–373, 2016.
Leamy, H., “Charge Collection Scanning Electron Microscopy,” Journal of Applied Physics, Vol. 53, No. 6, pp. R51–R80, 1982.
Provis, J. L., Myers, R. J., White, C. E., Rose, V., and Van Deventer, J. S., “X-Ray Microtomography Shows Pore Structure and Tortuosity in Alkali-Activated Binders,” Cement and Concrete Research, Vol. 42, No. 6, pp. 855–864, 2012.
Cho, M. K., Youn, H., Jang, S. Y., Lee, S., Han, M.-C., et al., “Digital Tomosynthesis in Cone-Beam Geometry for Industrial Applications: Feasibility and Preliminary Study,” Int. J. Precis. Eng. Manuf., Vol. 13, No. 9, pp. 1533–1538, 2012.
Sheen, D. M., Mc Makin, D. L., and Hall, T. E., “Three-Dimensional Millimeter-Wave Imaging for Concealed Weapon Detection,” IEEE Transactions on Microwave Theory and Techniques, Vol. 49, No. 9, pp. 1581–1592, 2001.
Seo, Y. B., Yun, Y. H., and Joo, K.-N., “3D Multi-Layered Film Thickness Profile Measurements Based on Photometric Type Imaging Ellipsometry,” Int. J. Precis. Eng. Manuf., Vol. 17, No. 8, pp. 989–993, 2016.
Bae, D., Lee, J., Lee, S., Jung, K., Hwang, S., et al., “Nondestructive Evaluation on Hydrogen Effect of 316 l Stainless Steel,” Int. J. Precis. Eng. Manuf.-Green Tech., Vol. 3, No. 1, pp. 99–103, 2016.
Roh, H. D., Lee, H., and Park, Y.-B., “Structural Health Monitoring of Carbon-Material-Reinforced Polymers Using Electrical Resistance Measurement,” Int. J. Precis. Eng. Manuf.-Green Tech., Vol. 3, No. 3, pp. 311–321, 2016.
Uchic, M. D., Holzer, L., Inkson, B. J., Principe, E. L., and Munroe, P., “Three-Dimensional Microstructural Characterization Using Focused Ion Beam Tomography,” MRS Bulletin, Vol. 32, No. 5, pp. 408–416, 2007.
Bilegt, E., Yoon, H.-S., Lee, H.-T., Kim, E.-S., Kim, C.-S., et al., “Design and Evaluation of Micro-Cutting Tools for Local Planarization,” Int. J. Precis. Eng. Manuf., Vol. 17, No. 10, pp. 1267–1273, 2016.
Wilson, J. R., Kobsiriphat, W., Mendoza, R., Chen, H.-Y., Hiller, J. M., et al., “Three-Dimensional Reconstruction of a Solid-Oxide Fuel-Cell Anode,” Nature Materials, Vol. 5, No. 7, pp. 541–544, 2006.
Iwai, H., Shikazono, N., Matsui, T., Teshima, H., Kishimoto, M., et al., “Quantification of SOFC Anode Microstructure Based on Dual Beam FIB-SEM Technique,” Journal of Power Sources, Vol. 195, No. 4, pp. 955–961, 2010.
Volkert, C. A. and Minor, A. M., “Focused Ion Beam Microscopy and Micromachining,” MRS Bulletin, Vol. 32, No. 5, pp. 389–399, 2007.
Gasser, P., Klotz, U. E., Khalid, F. A., and Beffort, O., “Site-Specific Specimen Preparation by Focused Ion Beam Milling for Transmission Electron Microscopy of Metal Matrix Composites,” Microscopy and Microanalysis, Vol. 10, No. 2, pp. 311–316, 2004.
Ali, M. Y., Hung, W., and Yongqi, F., “A Review of Focused Ion Beam Sputtering,” Int. J. Precis. Eng. Manuf., Vol. 11, No. 1, pp. 157–170, 2010.
Uchic, M. D., Groeber, M. A., Dimiduk, D. M., and Simmons, J., “3D Microstructural Characterization of Nickel Superalloys Via Serial-Sectioning Using a Dual Beam FIB-SEM,” Scripta Materialia, Vol. 55, No. 1, pp. 23–28, 2006.
Groeber, M., Haley, B., Uchic, M., Dimiduk, D., and Ghosh, S., “3D Reconstruction and Characterization of Polycrystalline Microstructures Using a FIB-SEM System,” Materials Characterization, Vol. 57, No. 4, pp. 259–273, 2006.
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Bae, K., Kim, J.W., Son, Jw. et al. 3D Evaluation of Porous Zeolite Absorbents Using FIB-SEM Tomography. Int. J. of Precis. Eng. and Manuf.-Green Tech. 5, 195–199 (2018). https://doi.org/10.1007/s40684-018-0019-4
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s40684-018-0019-4