摘要
采用射频磁控溅射方法制备了总厚度约 320 nm 的 Al2O3/Y2O3 复合涂层, 并对其进行真空, Ar气和H2三种不同气氛退火处理, 研究微观形貌对涂层阻氘性能的影响. 结果表明, 热处理后涂层保持致密且界面清晰, 经 Ar气和 H2 气氛退火处理后, Al2O3/Y2O3 涂层由 γ-Al2O3 相和立方Y2O3相组成; 然而, 在真空气氛下, 涂层中仅有立方Y2O3相存在. 相对 316L 不锈钢基体材料而言, 涂层样品可将氘渗透率降低2–3 个数量级, 表现出良好的阻氘性能. H2 气氛下, H2还原作用使得 Al2O3/Y2O3 涂层中存在大量氧空位, 为氘的渗透提供快速扩散通道; 另外, 真空退火后涂层表面较大的表面粗糙度增大了氘分子的表面吸附量, 从而使得氘渗透率增大; Ar气气氛退火后样品, 适宜表面形态使得其具有良好的阻氘性能, 在 700 °C 和 80 kPa 渗透氘压下氘渗透率最低, 具体数值为 9.99477 × 10–14 mol·m−1·s−1·Pa−0.5.研究表明, 涂层的存在均降低了氘渗透率, 但阻氘性能存在差异主要受涂层表面粗糙度和涂层内部微观缺陷的共同影响.
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References
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This work was financially supported by the National Key Research and Development Program of China (Nos. 2016YFB0600102 and 2016YFB0600103) and the National Natural Science Foundation of China (No. 51671034).
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Wang, WJ., Yu, QH., Liu, XP. et al. Microstructure and deuterium resistance of Al2O3/Y2O3 composite coating with different annealing atmospheres. Rare Met. 41, 877–882 (2022). https://doi.org/10.1007/s12598-021-01797-y
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DOI: https://doi.org/10.1007/s12598-021-01797-y