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A study on tuning the optical properties of stacked SiN/SiO2 mirrors in distributed Bragg’s reflectors

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Abstract

Optimization and tuning SiN/SiO2 (78 nm/109 nm)-based DBR stacked mirrors were performed aiming at achieving a high reflectivity covering a wide range of visible spectrum. The optical tuning process was carried out by using transfer matrix method (TMM) simulation software. The results showed a high reflectivity of 99.9% for 8 pairs of quarter wavelength thickness layers of the SiN and SiO2 centered at the visible wavelength of 633 nm, and a flat stop band width of 195 nm. Characterizations of the DBR layers were manipulated by increasing and decreasing the layers thickness by ± 2 nm each time. A blueshift and narrow stop band width were observed with decreasing the layer stuck thickness up to − 12 nm. In contrast, the stop band peak was shifted to 793 nm and the stop band width was increased to 270 nm by increasing the stacked layer thickness up to + 12 nm. Moreover, increasing the angle of incident from 0 to 70° has led to decrease the stop band from 640 to 530 nm, while changing the substrate type had no significant effect on the spectral response of the DBR. Tunable DBRs with fixed material refractive index can be interestingly used for the applications of active and passive optical devices.

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Methodology was contributed by KNS; Formal analysis and investigation were contributed by KNS, FFM, and HAM; Writing—original draft preparation was contributed by KNS; Writing—review and editing was contributed by KNS, FFM, and HAM.

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Correspondence to Fahmi F. Muhammadsharif.

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Sediq, K.N., Muhammadsharif, F.F. & Muhammad, H.A. A study on tuning the optical properties of stacked SiN/SiO2 mirrors in distributed Bragg’s reflectors. J Opt 51, 937–942 (2022). https://doi.org/10.1007/s12596-022-00846-8

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