Skip to main content
SpringerLink
Log in

A technical report on fabrication of SU-8 optical waveguides

  • Short Note/Short Communication
  • Published:
Journal of Optics Aims and scope Submit manuscript

Abstract

Technical considerations of fabrication and optical characterization of SU-8 multimode waveguides are reported. This low cost, simple technology may directly be used for guided-wave MOEMS and optical interconnection.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5

References

  1. L. Eldada, L.W. Shacklette, Advances in polymer integrated optics. IEEE J. Sel. Top. Quant. Electron. 6, 54 (2000)

    Article  Google Scholar 

  2. H. Lorentz, M. Despont, N. Fahrni, N. LaBlance, P. Renaud, SU-8: a low cost negative resist for MEMS. J. Micromech. Microeng. 7, 121 (1997)

    Article  ADS  Google Scholar 

  3. P.K. Dey, S. Das, P. Ganguly, Fabrication of polymer micro-tip by optical lensing technique. Microsyst. Technol. 18, 623 (2012)

    Article  Google Scholar 

  4. B. Yang, Y. Zhu, Y. Jiao, L. Yang, Z. Sheng, S. He, D. Dai, Compact arrayed waveguide grating devices based on small SU-8 strip waveguides. J. Lightwave Technol. 29, 2009 (2011)

    Article  ADS  Google Scholar 

  5. D. Esinenco, S.D. Psoma, M. Kusko, A. Schneider, R. Muller, SU-8 micro-biosensor based on mach-zehnder interferometer. Rev. Adv. Mater. Sci. 10, 295 (2005)

    Google Scholar 

  6. R. Singhal, M.N. Satyanarayan, S. Pal, Effect of residual resist on performance of single-mode 1x4 optical splitter in photosensitive polymer. Fiber Integr. Opt. 29, 480 (2010)

    Article  Google Scholar 

  7. B. Yang, L. Yang, R. Hu, Z. Sheng, D. Dai, Q. Liu, S. He, Fabrication and characterization of small optical ridge waveguides based on SU-8 polymer. J. Lightwave Technol. 27, 4091 (2009)

    Article  ADS  Google Scholar 

  8. R. Singhal, M.N. Satyanarayan, S. Pal, Fabrication of single mode Y-branch waveguides in photosensitive polymer with reduced Y-junction residue. Optik 123, 1911 (2012)

    Article  ADS  Google Scholar 

  9. M. Nordstrona, D.A. Zauner, A. Boisen, J. Hubner, Single mode waveguides with SU-8 polymer core and cladding for MOEMS applications. J. Lightwave Technol. 25, 1284 (2007)

    Article  ADS  Google Scholar 

  10. MicroChem, http://www.microchem.com/

  11. P. Ganguly, Semi-analytical analysis of lithium niobate photonic wires. Opt. Commun. 285, 4347 (2012)

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Advanced Technology Development Centre, Indian Institute of Technology, Kharagpur, 721302, India

    P. K. Dey & P. Ganguly

Authors
  1. P. K. Dey
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. P. Ganguly
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to P. Ganguly.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Dey, P.K., Ganguly, P. A technical report on fabrication of SU-8 optical waveguides. J Opt 43, 79–83 (2014). https://doi.org/10.1007/s12596-013-0144-y

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s12596-013-0144-y

Keywords

Search

Navigation