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Red-Green-Blue wavelength interferometry and TV holography for surface metrology

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Abstract

Surface discontinuities greater than half a wavelength can not be measured unambiguously using single wavelength interferometry. In TV holography, it is difficult to quantify the data under relatively large loading conditions due to the overcrowding of fringes with a single wavelength. Further, single wavelength does not reveal the contour of rough surfaces with TV holography. Multiple wavelengths measurements using red, green, and blue wavelengths can overcome these problems. In this paper a multiple wavelength interferometric system with colour CCD is demonstrated for such measurements. The interference patterns are recorded by a single chip colour CCD camera which makes the data acquisition as simple as in single wavelength case. The interference pattern is decomposed into its R G B components to evaluate the phase at individual wavelengths. An eight step phase shifting algorithm is used to simplify the application of phase shifting technique in the multiple wavelength system. Experimental results on an etched silicon sample for the measurement of large discontinuities and on a MEMS pressure sensor for the measurement of shape and relatively large deflection are presented.

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References

  1. W. Osten, Optical inspection of microsystems (CRC, Boca Raton, 2007)

    Google Scholar 

  2. L. Yang, P. Colbourne, Digital laser micro-interferometer and its applications. Opt Eng 42, 1417–1426 (2003)

    Article  ADS  Google Scholar 

  3. N. Krishna Mohan, P.K. Rastogi, Recent developments in interferometry for microsystems metrology. Opt Lasers Eng 47, 349–354 (2009)

    Article  Google Scholar 

  4. K. Creath, Step height measurement using two-wavelength phase-shifting interferometry. Appl Opt 26, 2810–2816 (1987)

    Article  ADS  Google Scholar 

  5. J. Schmit, P. Hariharan, Two-wavelength interferometry profilometry with a phase-step error - compensating algorithm. Opt Eng 45, 115602-1–115602-3 (2006)

    Article  ADS  Google Scholar 

  6. U. Paul Kumar, B. Bhaduri, N. Krishna Mohan, M.P. Kothiyal, Two wavelength microinterferometry for 3-D surface profiling. Opt Lasers Eng 47, 223–229 (2009)

    Article  Google Scholar 

  7. P. de Groot, L. Deck, Three-dimensional imaging by sub-Nyquist sampling of white-light interferograms. Opt Lett 18, 1462–1464 (1993)

    Article  ADS  Google Scholar 

  8. P. de Groot, L. Deck, Surface profiling by analysis of white-light interferograms in the spatial frequency domain. J Mod Opt 42, 389–401 (1995)

    Article  ADS  Google Scholar 

  9. P. Sandoz, G. Tribillon, H. Perrin, High resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white light interferogram. J Mod Opt 43, 701–708 (1996)

    Article  ADS  Google Scholar 

  10. S.K. Debnath, M.P. Kothiyal, Experimental study of the phase-shift miscalibration error in phase shifting interferometry: use of a spectrally resolved white-light interferomete. Appl Opt 46, 5103–5109 (2006)

    Article  ADS  Google Scholar 

  11. Y.-Y. Cheng, J. Wyant, Multiple wavelength phase-shifting interferometry. Appl Opt 24, 804–807 (1985)

    Article  ADS  Google Scholar 

  12. A. Pfortner, J. Schwider, Red-green-blue interferometer for the metrology of discontinuous structures. Appl Opt 42, 667–673 (2003)

    Article  ADS  Google Scholar 

  13. U. Paul Kumar, N. Krishna Mohan, M.P. Kothiyal, Measurement of discontinuous surfaces using multiple wavelength interferometry. Opt Eng 48, 073603-1–073603-8 (2009)

    Google Scholar 

  14. E. Hack, B. Frei, R. Kästle, U. Sennhauser, Additive-Subtractive two-wavelength ESPI contouring by using a synthetic wavelength phase shift. Appl Opt 37, 2591–2597 (1998)

    Article  ADS  Google Scholar 

  15. U. Paul Kumar, N. Krishna Mohan, M.P. Kothiyal, Deformation and shape measurement using multiple wavelength microscopic TV holography. Opt Eng 48, 023601-1–023601-10 (2009)

    Google Scholar 

  16. J. Schmit, K. Creath, Windows function influence on phase error in phase shifting algorithms. Appl Opt 35, 5642–5649 (1996)

    Article  ADS  Google Scholar 

Download references

Acknowledgement

This work is supported by Defense Research and Development Organization (DRDO).

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Authors and Affiliations

  1. Applied Optics Laboratory, Department of Physics, Indian Institute of Technology Madras, Chennai, 600036, India

    U. Paul Kumar, N. Krishna Mohan & M. P. Kothiyal

Authors
  1. U. Paul Kumar
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  2. N. Krishna Mohan
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  3. M. P. Kothiyal
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Correspondence to N. Krishna Mohan.

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Kumar, U.P., Mohan, N.K. & Kothiyal, M.P. Red-Green-Blue wavelength interferometry and TV holography for surface metrology. J Opt 40, 176–183 (2011). https://doi.org/10.1007/s12596-011-0051-z

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  • DOI: https://doi.org/10.1007/s12596-011-0051-z

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