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Sensitivity analysis of surface topography using the submerged non uniform piezoelectric micro cantilever in liquid by considering interatomic force interaction

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Abstract

The aim of this study is modeling and investigating the micro-cantilever (MC) vibration behavior of atomic force microscopy (AFM) more accurately by taking into account the simultaneous effects of the MC shear changes and it’s torsional moment in the fluid environment. The MC vibration amplitude has been investigated in various equilibrium distances under the effect of MC angle, probe length, density and viscosity of different working environments. Surfaces topography has been studied in first three natural frequencies under the non-venial fluid effect. Obtained results illustrate a considerable time delay reduction compared to the air environment, particularly in the tapping mode and higher frequencies. Efast sensitivity analysis statistical method, which is found efficient and quick, has been applied in order to analyze the geometrical parameters’ effects on the MC vibration behavior. Results indicate the low intensity of the effect exerted by the layers’ width compared to the effect of the length.

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Correspondence to Alireza Habibnejad Korayem.

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Recommended by Associate Editor Dong-Weon Lee

Alireza Habibnejad Korayem was born in Tehran Iran on 1989. He received his B.Sc. (2011), M.Sc. (2013) and Ph.D. (2017) from Iran University of Science and Technology in mechanical engineering.

Mitra Taghizade was born in Hamedan Iran on 1991. She received her B.Sc. (2013) from the Bu-Ali Sina University and M.Sc. (2016) from the Iran University of Science and Technology in mechanical engineering.

Moharam Habibnejad Korayem was born in Tehran Iran on April 21, 1961. He received his B.Sc. (Hon) and M.Sc. in Mechanical Engineering from the Amirkabir University of Technology in 1985 and 1987, respectively. He has obtained his Ph.D. degree in mechanical engineering from the University of Wollongong, Australia, in 1994. He is a Professor in mechanical engineering at the Iran University of Science and Technology. He has been involved with teaching and research activities in the robotics areas at the Iran University of Science and Technology for the last 19 years. His research interests include dynamics of elastic mechanical manipulators, trajectory optimization, symbolic modeling, robotic multimedia software, mobile robots, industrial robotics standard, robot vision, soccer robot, and the analysis of mechanical manipulator with maximum load carrying capacity. He has published more than 550 papers in international journal and conference in the robotic area.

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Korayem, A.H., Taghizade, M. & Korayem, M.H. Sensitivity analysis of surface topography using the submerged non uniform piezoelectric micro cantilever in liquid by considering interatomic force interaction. J Mech Sci Technol 32, 2201–2207 (2018). https://doi.org/10.1007/s12206-018-0430-3

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  • DOI: https://doi.org/10.1007/s12206-018-0430-3

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