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Taguchi Optimization of Wear Resistance of CrN Coatings Deposited on WC Substrates Using High-Power Impulse Magnetron Sputtering Technology and Application to High-Speed Micro-Drilling

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Abstract

Chromium nitride (CrN) coatings were deposited on tungsten carbide (WC) substrates using a high-power impulse magnetron sputtering (HiPIMS) system. The deposition parameters were optimized using the robust Taguchi design method. It was shown that the optimal wear resistance was obtained using a substrate bias of − 80 V, a pulse current of 250 A, a N2/Ar ratio of 30/50, and a pulse duration of 200 μs. The resulting coating not only had an excellent wear resistance, but also showed a high hardness (41.2 GPa) and a superior adhesion strength (Lc >100 N). The coating was deposited on WC-fluted micro-drills and used in a series of high-speed PCB through-hole drilling tests. It was found that the coating improved the lifetime of the micro-drill by a factor of at least two times compared to that of an uncoated drill.

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References

  1. A. Zeilinger, R. Daniel, T. Schöberl, M. Stefenelli, B. Sartory, J. Keckes and C. Mitterer, Resolving Depth Evolution of Microstructure and Hardness in Sputtered CrN Film, Thin Solid Films, 2015, 581, p 75–79.

    Article  CAS  Google Scholar 

  2. M.C.R. Guimaraesa, B.C.N.M.D. Castilhoa, T.D.S. Nossa, P.R.T. Avilaa, S. Cucattic, F. Alvarezc, J.L. Garciad and H.C. Pinto, On the Effect of Substrate Oscillation on CrN Coatings Deposited by HiPIMS and dcMS, Surf. Coat. Technol., 2018, 340, p 112–120.

    Article  CAS  Google Scholar 

  3. T. Wierzchoń, I. Ulbin-Pokorska and K. Sikorski, Corrosion Resistance of Chromium Nitride and Oxynitride Layers Produced Under Glow Discharge Conditions, Surf. Coat. Technol., 2000, 130, p 274–279.

    Article  Google Scholar 

  4. J. Lin, N. Zhang, W.D. Sproul and J.J. Moore, A Comparison of the Oxidation Behavior of CrN Films Deposited Using Continuous dc, Pulsed dc and Modulated Pulsed Power Magnetron Sputtering, Surf. Coat. Technol., 2012, 206, p 3283–3290.

    Article  CAS  Google Scholar 

  5. K. Ibrahim, M.M. Rahman, X. Zhao, J.P. Veder, Z.-F. Zhou, E. Mohammadpour, R.H. Majeed, A.N. Nikoloski and Z.-T. Jiang, Annealing Effects on Microstructural, Optical, and Mechanical Properties of Sputtered CrN Thin Film Coatings: Experimental Studies and Finite Element Modeling, J. Alloy. Compd., 2018, 750, p 451–464.

    Article  CAS  Google Scholar 

  6. A.P. Ehiasarian, PEh. Hovsepian, L. Hultman and U. Helmersson, Comparison of Microstructure and Mechanical Properties of Chromium Nitride-Based Coatings Deposited by High Power Impulse Magnetron Sputtering and by the Combined Steered Cathodic Arc/Unbalanced Magnetron Technique, Thin Solid Films, 2004, 457, p 270–277.

    Article  CAS  Google Scholar 

  7. A.L. Bandeira, R. Trentin, C. Aguzzoli, M.E.H.M.D. Costa, A.F. Michels, I.J.R. Baumvo, M.C.M. Farias and C.A. Figueroa, Sliding Wear and Friction Behavior of CrN-Coating in Ethanol and Oil–Ethanol Mixture, Wear, 2013, 301, p 786–794.

    Article  CAS  Google Scholar 

  8. M.C. Kang, S.K. Je, K.H. Kim and B. Shim, Cutting Performance of CrN-Based Coatings Tool Deposited by Hybrid Coating Method for Micro drilling Applications, Surf. Coat. Technol., 2008, 202, p 5629–5632.

    Article  CAS  Google Scholar 

  9. W. Tillmann, D. Stangier, N.F.L. Dias, N. Gelinski, M. Stanko, M. Stommel, E. Krebs and D. Biermann, Reduction of Ejection Forces in Injection Molding by Applying Mechanically Post-Treated CrN and CrAlN PVD Films, J. Manuf. Mater. Process., 2019, 3, p 1–15.

    Google Scholar 

  10. K.D. Bouzakis, A. Asimakopoulos and M. Batsiolas, Characterization of Fatigue and Adhesion Properties of a-C:H/CrN Coatings on Bearing Rings by Impact Tests, Surf. Coat. Technol., 2008, 15, p 5929–5935.

    Article  CAS  Google Scholar 

  11. M. Lattemann, A.P. Ehiasarian, J. Bohlmark, P.Å.O. Persson and U. Helmersson, Investigation of High Power Impulse Magnetron Sputtering Pretreated Interfaces for Adhesion Enhancement of Hard Coatings on Steel, Surf. Coat. Technol., 2006, 200, p 6495–6499.

    Article  CAS  Google Scholar 

  12. B. Navinšek, P. Panjan and I. Milošev, Industrial Applications of CrN (PVD) Coatings, Deposited at High and Low Temperatures, Surf. Coat. Technol., 1997, 97, p 182–191.

    Article  Google Scholar 

  13. W. Siriprom, C. Chananonnawathorn, S. Kongsriprapan, K. Teanchai and M. Horprathum, Preparation and Characterization of CrN Thin Film by DC Reactive Magnetron Sputtering, Mater. Today: Proceed., 2018, 5(7), p 15224–15227.

    CAS  Google Scholar 

  14. N.E. Beliardouh, K. Bouzid, C. Nouveau, B. Tlili and M.J. Walock, Tribological and Electrochemical Performances of Cr/CrN and Cr/CrN/CrAlN Multilayer Coatings Deposited by RF Magnetron Sputtering, Tribol. Int., 2015, 82, p 443–452.

    Article  CAS  Google Scholar 

  15. G.H. Song, L.U.O. Zhuo, L.I. Feng, L.J. Chen and C.L. He, Microstructure and Indentation Toughness of Cr/CrN Multilayer Coatings by Arc Ion Plating, Trans. Nonferrous Metals Soc. China, 2015, 25, p 811–816.

    Article  CAS  Google Scholar 

  16. J. Lin, Z.L. Wu, X.H. Zhang, B. Mishra, J.J. Moore and W.D. Sproul, A comparative Study of CrNx coatings Synthesized by dc and Pulsed dc Magnetron Sputtering, Thin Solid Films, 2009, 517, p 1887–1894.

    Article  CAS  Google Scholar 

  17. C. Pusch, H. Hoche, C. Berger, R. Riedel, E. Ionescu and A. Klein, Influence of the PVD sputtering method on structural characteristics of SiCN-coatings-Comparison of RF DC and HiPIMS Sputtering and Target Configurations, Surf. Coat. Technol., 2011, 205, p 5119–5123.

    Article  CAS  Google Scholar 

  18. C. Mitterer, O. Heuze and V.-H. Derttinger, Substrate and Coating Damage by Arcing During Sputtering, Surf. Coat. Technol., 1997, 89, p 233–238.

    Article  CAS  Google Scholar 

  19. A.P. Ehiasarian, R. New, W.-D. Munz, L. Hultman, U. Helmersson and V. Kouznetsov, Influence of High Power Densities on the Composition of Pulsed Magnetron Plasmas, Vacuum, 2002, 65, p 147–154.

    Article  CAS  Google Scholar 

  20. Z. Wang, D. Zhang, P. Ke, X. Liu and A. Wang, Influence of Substrate Negative Bias on Structure and Properties of TiN Coatings Prepared by Hybrid HIPIMS Method, J. Mater. Sci. Technol., 2015, 31, p 37–42.

    Article  CAS  Google Scholar 

  21. J.T. Gudmundsson, On the Plasma Parameters in the High Power Impulse Magnetron Sputtering Discharge (HiPIMS), Am. Phys. Soc., 2008, 3, p 13–17.

    Google Scholar 

  22. M. Lichinchi, C. Lenardi, J. Haupt and R. Vitali, Simulation of Berkovich Nanoindentation Experiments on Thin Films Using Finite Element Method, Thin Solid Films, 1998, 312, p 240–248.

    Article  CAS  Google Scholar 

  23. Y.X. Ou, J. Lin, H.L. Che, J.J. Moore, W.D. Sproul and M.K. Lei, Mechanical and Tribological Properties of CrN/TiN Superlattice Coatings Deposited by a Combination of Arc-Free Deep Oscillation Magnetron Sputtering with Pulsed dc Magnetron Sputtering, Thin Solid Films, 2015, 594, p 147–155.

    Article  CAS  Google Scholar 

  24. W.H. Kao, High-Speed Drilling Performance of Coated Micro-Drills with Zr-C:H:Nx% Coatings, Wear, 2009, 267, p 1068–1074.

    Article  CAS  Google Scholar 

  25. H. Hajihoseini, M. Kateb, S. Ingvarsson and J.T. Gudmundsson, Effect of Substrate Bias on Properties of HiPIMS Deposited Vanadium Nitride Films, Thin Solid Films, 2018, 663, p 126–130.

    Article  CAS  Google Scholar 

  26. M. Bowes and J.W. Bradley, Inert Gas Effects on the Deposition rate of TiO2 During Reactive HiPIMS, Surf. Coat. Technol., 2014, 250, p 2–6.

    Article  CAS  Google Scholar 

  27. F. Ferreira, R. Serra, J.C. Oliveira and A. Cavaleiro, Effect of Peak Target Power on the Properties of Cr Thin Films Sputtered by HiPIMS in Deep Oscillation Magnetron Sputtering (DOMS) Mode, Surf. Coat. Technol., 2014, 258, p 249–256.

    Article  CAS  Google Scholar 

  28. L. Wang, J. Jin, C. Zhu, G. Li, X. Kuanga and K. Huang, Effects of HiPIMS Pulse-Length on Plasma Discharge and on the Properties of WC-DLC Coatings, Appl. Surf. Sci., 2019, 487, p 526–538.

    Article  CAS  Google Scholar 

  29. Š Batková, J. Čapek, J. Rezek, R. Čerstvý and P. Zeman, Effect of Positive Pulse Voltage in Bipolar Reactive HiPIMS on Crystal Structure, Microstructure and Mechanical Properties of CrN Films, Surf. Coat. Technol., 2020, 393, p 125773.

    Article  CAS  Google Scholar 

  30. B. Biswas, Y. Purandare, A. Sugumaran, I. Khan and P.E.H. Hovsepian, Effect of Chamber Pressure on Defect Generation and Their Influence on Corrosion and Tribological Properties of HIPIMS Deposited CrN/NbN Coatings, Surf. Coat. Technol., 2018, 336, p 84–91.

    Article  CAS  Google Scholar 

  31. C.L. Chang, S.G. Shih, P.H. Chen, W.C. Chen, C.T. Ho and W.Y. Wu, Effect of Duty Cycles on the Eposition and Characteristics of High Power Impulse Magnetron Sputtering Deposited TiN Thin Films, Surf. Coat. Technol., 2014, 259, p 232–237.

    Article  CAS  Google Scholar 

  32. C. Nouvellon, M. Michiels, J.P. Dauchot, C. Archambeau, F. Laffineur, E. Silberberg, S. Delvaux, R. Cloots, S. Konstantinidis and R. Snyders, Deposition of Titanium Oxide Films by Reactive High Power Impulse Magnetron Sputtering (HiPIMS): Influence of the Peak Current Value on the Transition From Metallic to Poisoned Regimes, Surf. Coat. Technol., 2012, 206, p 3542–3549.

    Article  CAS  Google Scholar 

  33. S.V. Dave, A. Bhogayata and N.K. Arora, Mix Design Optimization for Fresh, Strength and Durability Properties, Construct. Build. Mater., 2021, 284, p 122822.

    Article  CAS  Google Scholar 

  34. R. Thirumalai, J.S. Senthilkumaar, P. Selvarani and S. Ramesh, Machining Characteristics of Inconel 718 Under Several Cutting Conditions Based on Taguchi Method, Mech. Eng. Sci., 2013, 227, p 1–9.

    Google Scholar 

  35. Z. Sefrou and N.E. Belkhouche, Cloud Point Extraction of La(III) by C13E10 Non-ionic Surfactant: Statistical Refinement of Experimental Optimization by L9 Taguchi’s Design, Chem. Eng. Res. Des., 2020, 153, p 819–828.

    Article  CAS  Google Scholar 

  36. W.H. Kao, Y.L. Su, J.H. Horng and C.C. Yue, Effects of Pulse Power and Argon Flux Flow Rate on Mechanical and Tribological Properties of Diamond-Like Carbon Coatings Prepared Using High Power Impulse Magnetron Sputtering Technology, Thin Solid Films, 2020, 693, p 137712.

    Article  CAS  Google Scholar 

  37. Y. Chen, S. Wang, Y. Hao, J. Pu, X. Jiang, L.F. Huang and L. Wang, Friction and Wear Behavior of CrN Coating on 316L Stainless Steel in Liquid Sodium at Elevated Temperature, Tribol. Int., 2020, 143, p 106079.

    Article  CAS  Google Scholar 

  38. H. Decho, A. Mehner, H.W. Zoch and H.R. Stock, Optimization of Chromium Nitride (CrNx) Interlayers for Hydrogenated Amorphous Carbon (a-C:H) Film Systems with Respect to the Corrosion Protection Properties by High Power Impulse Magnetron Sputtering (HiPIMS), Surf. Coat. Technol., 2016, 293, p 35–41.

    Article  CAS  Google Scholar 

  39. J. Lin, W.D. Sproul, J.J. Moore, R. Chistyakov and B. Abraham, Structurally Laminated CrN films Deposited by Multi Pulse Modulated Pulsed Power Magnetron Sputtering, Surf. Coat. Technol., 2011, 206, p 1780–1786.

    Article  CAS  Google Scholar 

  40. J. Lin, W.D. Sproul, J.J. Moore, S. Lee and S. Myers, High Rate Deposition of thick CrN and Cr2N Coatings Using Modulated Pulse Power (MPP) Magnetron Sputtering, Surf. Coat. Technol., 2011, 205, p 3326–3234.

    Google Scholar 

  41. J. Paulitsch, M. Schenkel, Th. Zufraß, P.H. Mayrhofer and W.-D. Münz, Structure and Properties of High Power Impulse Magnetron Sputtering and DC Magnetron Sputtering CrN and TiN Films Deposited in an Industrial Scale Unit, Thin Solid Films, 2010, 518, p 5558–5564.

    Article  CAS  Google Scholar 

  42. X. Sui, J. Liu, S. Zhang, J. Yang and J. Hao, Microstructure, Mechanical and Tribological Characterization of CrN/DLC/Cr-DLC Multilayer Coating with Improved Adhesive Wear Resistance, Appl. Surf. Sci., 2018, 439, p 24–32.

    Article  CAS  Google Scholar 

  43. Z. Tan, L. Wang, Y. Xue, P. Zhang, T. Cao and X. Cheng, High-Entropy Alloy Particle Reinforced Al-Based Amorphous Alloy Composite with Ultrahigh Strength Prepared by Spark Plasma Sintering, Mater. Des., 2016, 109, p 219–226.

    Article  CAS  Google Scholar 

  44. Y. Zhong, L. Liu, S. Wikman, D. Cui and Z. Shen, Intragranular Cellular Segregation Network Structure Strengthening 316L Stainless Steel Prepared by Selective Laser Melting, J. Nucl. Mater., 2016, 470, p 170–178.

    Article  CAS  Google Scholar 

  45. N. Meunier, P. Drogui, C. Montane, R. Hausler, G. Mercier and J.-F. Blais, Comparison between Electrocoagulation and Chemical Precipitation for Metals Removal from Acidic Soil Leachate, J. Hazard. Mater., 2006, 137, p 581–590.

    Article  CAS  Google Scholar 

  46. C. Qiu, B. Hu, J. Zhou, P. Wu, Y. Liu, C. Wang and Y. Du, The Phase Equilibria of the Cu–Cr–Ni and Cu–Cr–Ag systems: Experimental Investigation and Thermodynamic Modeling, CALPHAD: Comput. Coupling Phase Diagr. Thermochem., 2020, 68, p 101734.

    Article  CAS  Google Scholar 

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Acknowledgments

The authors gratefully acknowledge the financial support provided to this study by the Ministry of Science and Technology of Taiwan under Contract No. MOST 107-2221-E-270-002-MY2.

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Kao, W.H., Su, Y.L. & Chung, S.T. Taguchi Optimization of Wear Resistance of CrN Coatings Deposited on WC Substrates Using High-Power Impulse Magnetron Sputtering Technology and Application to High-Speed Micro-Drilling. J. of Materi Eng and Perform 30, 6243–6257 (2021). https://doi.org/10.1007/s11665-021-05851-9

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