Abstract
Etch selectivities for InN over GaN as high as 40 and 100 are achieved in BBr3/Ar and BI3/Ar, respectively, under inductively coupled plasma conditions. Previous work on Cl2-based plasma chemistries has produced selectivity in the reverse direction, i.e., GaN over InN, and therefore the introduction of these new Br2- and I2-based mixtures facilitates device fabrication involving double heterostructures of GaN/InxGa1−xN/GaN. Selectivities up to 10 for InN over the common mask materials SiO2 and SiNx were obtained in both BI3 and BBr3.
Similar content being viewed by others
References
S.J. Pearton and R.J. Shul, GaN Vol. 1, ed. J.I. Pankove and T.D. Moustakas (San Diego: Academic Press, 1998).
H.P. Gillis, D.A. Choutov and K.P. Martin, J. Materials 48, 50 (1996).
I. Adesida, A. Mahajan, E. Andideh, M.A. Khan, D.T. Olsen and J.N. Kuznia, Appl. Phys. Lett. 63, 2777 (1993).
S. Nakamura, T. Mukai and M. Senoh, Appl. Phys. Lett. 64, 1687 (1994).
S. Nakamura, M. Senoh, S. Nagahama, N. Iwasa, T. Yamada, T. Matsushita, H Kiyoku and Y. Sugimoto, Jpn. J. Appl. Phys. 35, L74 (1996).
S.M. Donovan, J.D. MacKenzie, C.R. Abernathy, S.J. Pearton, F. Ren, K. Jones and M.W. Cole, Appl. Phys. Lett. 70, 2592 (1997).
C.B. Vartuli, S.J. Pearton, J.D. MacKenzie, C.R. Abernathy and R.J. Shul, J. Electrochem. Soc. 143, L246 (1996).
R.J. Shul, C.G. Willison, M.M. Bridges, J. Han, J.W. Lee, S.J. Pearton, C.R. Abernathy, J.D. MacKenzie and S.M. Donovan, Mat. Res. Soc. Symp. Proc. 478 (Warrendale, PA: Mater. Res. Soc., 1998), p. 208.
R.J. Shul, C.G. Willison, M.M. Bridges, J.Han, J.W. Lee, S. J. Pearton, C.R. Abernathy, J.D. MacKenzie, S.M. Donovan, L. Zhang and L.F. Lester, J. Vac. Sci. Technol. A. (May/June 1998).
D.C. Flanders, L.D. Pressman and G. Pirelli, J. Vac. Sci. Technol. B 8, 1990(1990).
G. Doughty, S. Thomas, V. Law and C.D.W. Wilkinson, Vacuum 36, 803 (1986).
S.J. Pearton, V.K. Chakrabarti, W.S. Hobson, C.R. Abernathy, A. Katz, F. Ren, T.R. Fullowan and A. Perley, J. Electrochem. Soc. 139, 1763 (1992).
H. Cho, J. Hong, T. Maeda, S.M. Donovan, J.D. MacKenzie, C.R. Abernathy, S.J. Pearton, R.J. Shul and J. Han, MRS Int. J. Nitride Semicond. Res., 3 (5) (1998).
C.R. Abernathy, Mat. Sci. Eng. Rep. R 14, 203 (1995).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Cho, H., Hong, J., Maeda, T. et al. High selectivity plasma etching of InN over GaN. J. Electron. Mater. 27, 915–917 (1998). https://doi.org/10.1007/s11664-998-0118-z
Received:
Accepted:
Issue Date:
DOI: https://doi.org/10.1007/s11664-998-0118-z