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Toroidal Dipole All-Dielectric Metasurfaces with High Sensitivity, High Figure of Merit, and Robustness for Refractive Index Sensing

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Abstract

Refractive index sensing is of great significance in biological detection. Especially, all-dielectric metasurfaces can greatly improve the sensitivity of biological detection. However, the Q factor and electric field enhancement of most metasurfaces are generally low, resulting in low sensitivity and figure of merit (FOM). Meanwhile, fabrication tolerances may result in inability to achieve high-performance refractive index sensing. Here, we use finite element method (FEM) simulation to design a conical hole structure on an all-dielectric metasurface. The toroidal dipole resonance based on a conical hole structure can achieve a large-area electric field enhancement and a high Q factor, thereby achieving a sensitivity of 540 nm/RIU and FOM of 154.3. Meanwhile, considering the real fabrication tolerance, the proposed structure can still achieve high-sensitivity sensing when the conical hole structure changes the ellipsoidal structure. Therefore, the high sensitivity, high FOM, and robustness of the proposed structure make it highly significant for practical applications.

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The datasets are available from the corresponding author on reasonable request.

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Funding

This work was supported in part by the National Natural Science Foundation of China under Grant 62101375, and in part by the Zhejiang Provincial Natural Science Foundation of China under Grant No. LQ21F020001.

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  1. Department of Computer Science, Taizhou University, Zhejiang, 318000, China

    Yanyan Zheng, Ying Chen & Yingying Xu

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  1. Yanyan Zheng
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Correspondence to Yingying Xu.

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Zheng, Y., Chen, Y. & Xu, Y. Toroidal Dipole All-Dielectric Metasurfaces with High Sensitivity, High Figure of Merit, and Robustness for Refractive Index Sensing. J. Electron. Mater. 53, 674–682 (2024). https://doi.org/10.1007/s11664-023-10843-7

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