Abstract
Multilayer thin films of (Ba0.50Sr0.50)TiO3 (BST) and Ba(Zr0.15Ti0.85)O3 (BZT) were designed and grown using pulsed laser deposition technology. The periodic (BST/BZT)n thin films were deposited on Pt‹111›/SiO2/Si substrates. X-ray diffraction revealed the presence of a polycrystalline, perovskite structure corresponding to the bilayer thin film stacks. Scanning electron microscopy confirmed the multilayer structure without any interdiffusion across layers. It was also found that the dielectric and ferroelectric properties of the thin films were strongly influenced by the periodic heterostructures. The thin film stacks exhibited significantly higher tunability as compared with multilayer thin films grown on various single-crystal substrates such as LaAlO3, MgO and SrTiO3. Possible mechanisms explaining the other observed attributes such as improved dielectric properties and reduced leakage current are discussed. The effect of incorporating a comparatively lower-permittivity thin film in the multilayer stacks is presented. The observed properties of such multilayer structured films will aid in realizing low-loss and highly tunable applications.
Similar content being viewed by others
References
Q. Li, L. Chen, M.R. Gadinski, S.H. Zhang, G.Z. Zhang, H.Y. Li, A. Haque, L.Q. Chen, T.N. Jakson, and Q. Wang, Flexible high-temperature dielectric materials from polymer nanocomposites. Nature 523, 576 (2015).
K. Han, Q. Li, C. Chanthad, M.R. Gadinski, G.Z. Zhang, and Q. Wang, A hybrid material approach toward solution-processable dielectrics exhibiting enhanced breakdown strength and high energy density. Adv. Funct. Mater. 25, 3505 (2015).
V.S. Puli, P. Li, S. Adireddy, and D.B. Chrisey, Crystal structure, dielectric, ferroelectric and energy storage properties of La-doped BaTiO3 semiconducting ceramics. J. Adv. Dielectrics 5, 1550027 (2015).
L.B. Kong, S. Li, T.S. Zhang, J.W. Zhai, and F.Y.C. Boey, Electrically tunable dielectric materials and strategies to improve their performances. Prog. Mater. Sci. 55, 840 (2010).
P. Bao, T.J. Jackson, X. Wang, and M.J. Lancaster, Dielectric characterization of a ferroelectric film in the sub-GHz region. J. Phys. D Appl. Phys. 41, 063001 (2008).
M.W. Cole, and S.P. Alpay, Performance Enhanced Complex Oxide Thin Films for Temperature Stable Tunable Device Applications: A Materials Design and Process Science Prospective. Ferroelectrics—Material (Croatia: InTech, 2011).
Z. Xu, D. Yan, D. Xiao, P. Yu, and J. Zhu, Dielectric enhancement of BaSrTi1.1O3/BaSrTi1.05O3/BaSrTiO3 multilayer thin films prepared by RF magnetron sputtering. Ceram. Int. 39, 1639 (2013).
M.W. Cole, E. Ngo, S. Hirsch, J.D. Demaree, S. Zhong, and S.P. Alpay, The fabrication and material properties of compositionally multi-layered Ba1−xSrxTiO3 thin films for realization of temperature insensitive tunable phase shifter devices. J. Appl. Phys. 102, 034104 (2007).
D. Peng, J. Cheng, and Z. Meng, Low dielectric dissipation and enhanced tunability of Ba0.6Sr0.4TiO3 thin films by the modified composition and multilayer structure. J. Electroceram. 21, 668 (2008).
J. Miao, B.P. Zhang, K.H. Chew, and Y. Wang, Improvement of ferroelectric fatigue endurance in multiferroic (Ba0.5Sr0.5)TiO3/(Bi1.05La0.05)FeO3/(Ba0.5Sr0.5)TiO3 sandwich structures. Appl. Phys. Lett. 92, 062902 (2008).
C. Diao, H. Liu, H. Zheng, Z. Yao, J. Iqbal, M. Cao, and H. Hao, Enhanced energy storage properties of BaTiO3 thin films by Ba0.4Sr0.6TiO3 layers modulation. J. Alloys Compd. 765, 362 (2018).
B. Guigues, J. Guillan, E. Defay, P. Garrec, D. Wolozan, B. Andre, F. Laugier, R. Pantel, X. Gagnard, and M. Aıd, SrTiO3/BaTiO3 multilayers thin films for integrated tunable capacitors applications. J. Eur. Ceram. Soc. 27, 3851 (2007).
A.N. Tarale, M.M. Sutar, D.J. Salunkhe, P.B. Joshi, S.B. Kulkarni, R.C. Pawar, C.S. Lee, D.M. Phase, M. Gupta, and R.J. Chaudhary, Dielectric properties of sol–gel synthesized SrTiO3/(Ba0.7Sr0.3)TiO3 and SrTiO3/Ba(Zr0.3Ti0.7)O3 thin film heterostructures. J. Mater. Sci. Mater. Electron. 24, 1308 (2013).
X. Yan, W. Ren, P. Shi, X. Wu, X. Chen, and X. Yao, Ba0.5Sr0.5TiO3/Bi1.5Zn1.0Nb1.5TiO7 multilayer thin films prepared by sol–gel method. Appl. Surf. Sci. 255, 2129 (2008).
X.Y. Chen, Z.P. Xu, D.X. Yan, Y.S. Fan, J.G. Zhu, and P. Yu, Great enhancement of polarization in the (Ba0.67Sr0.33TiO3/LaNiO3)n multilayer thin films. J. Alloys Compd. 695, 1913 (2017).
J. Miao, H.Y. Tian, X.Y. Zhou, K.H. Pang, and Y. Wang, Microstructure and dielectric relaxor properties for Ba0.5Sr0.5TiO3/La0.67Sr0.33MnO3 heterostructure. J. Appl. Phys. 101, 084101 (2007).
J. Liao, X. Wei, Z. Xu, X. Wei, and P. Wang, The structure and dielectric properties of a novel kind of doped Ba0.6Sr0.4TiO3 film. Mater. Chem. Phys. 135, 1030 (2012).
S.X. Wang, M.S. Guo, X.H. Sun, T. Liu, M.Y. Li, and X.Z. Zhao, Tunable, low loss Bi1.5Zn1.0Nb1.5O7/Ba0.6Sr0.4TiO3/Bi1.5Zn1.0Nb1.5O7 sandwich films. Appl. Phys. Lett. 89, 212907 (2006).
S.Z. Wang, J.X. Liao, T.T. Feng, Y.M. Hu, H.Y. Yang, and M.Q. Wu, Structures and dielectric properties of multilayer BST/ST/BST and ST/BST/ST sandwich structures. Integr. Ferroelectr. 170, 120 (2016).
J. Singh, and S.B. Krupanidhi, Multilayer Bi1.5Zn1.0Nb1.5O7/Ba0.6Sr0.4TiO3/Bi1.5Zn1.0Nb1.5O7 thin films for tunable microwave applications. Appl. Surf. Sci. 257, 2214 (2011).
Y. Bian, and J. Zhai, Low dielectric loss Ba0.6Sr0.4TiO3/MgTiO3 composite thin films prepared by a sol–gel process. J. Phys. Chem. Solids 75, 759 (2014).
N. Zhao, L. Wan, L. Cao, D. Yu, S. Yu, and R. Sun, Dielectric enhancement of BaTiO3/BaSrTiO3/SrTiO3 multilayer thin films deposited on Pt/Ti/SiO2/Si substrates by sol–gel method. Mater. Lett. 65, 3574 (2011).
D. Bao, Multilayered dielectric/ferroelectric thin films and superlattices. Curr. Opin. Solid State Mater. 12, 55 (2008).
F. Yan, Y. Wang, H.L.W. Chan, and C.L. Choy, Ferroelectric properties of (Ba0.5Sr0.5)TiO3/Pb(Zr0.52Ti0.48)O3/(Ba0.5Sr0.5)TiO3 thin films with platinum electrodes. Appl. Phys. Lett. 82, 4325 (2003).
Y. Wang, J. Cui, Q. Yuan, Y. Niu, Y. Bai, and H. Wang, Significantly enhanced breakdown strength and energy density in sandwich-structured barium titanate/poly(vinylidene fluoride) nanocomposite. Adv. Mater. 27, 42 (2015).
T. Maiti, R. Guo, and A.S. Bhalla, Evaluation of experimental resume of BaZrxTi1−xO3 with perspective to ferroelectric relaxor family: an overview. Ferroelectrics 425, 4 (2011).
M.L.V. Mahesh, V.V. Bhanu Prasad, and A.R. James, Enhanced dielectric and ferroelectric properties of lead-free Ba(Zr0.15Ti0.85)O3 ceramics compacted by cold isostatic pressing. J. Alloys Compd. 611, 43 (2014).
M.L.V. Mahesh, V.V. Bhanuprasad, and A.R. James, Enhanced piezoelectric properties and tunability of lead-free ceramics prepared by high-energy ball milling. J. Electron. Mater. 42, 3547 (2013).
M.L.V. Mahesh, and A.R. James, Dependence of Ba(Zr0.15Ti0.85)O3 films growth on substrate temperature and oxygen gas pressure prepared by pulsed laser deposition. J. Nanopart. Res. 17, 482 (2015).
M.L.V. Mahesh, A.R. James, and V.V. Bhanu Prasad, In-situ post deposition annealing of lead-free ferroelectric thin films in oxygen rich atmosphere. J. Mater. Sci. Mater. Electron. 26, 4930 (2015).
Y.L. Li, S.Y. Hu, D. Tenne, A. Soukiassian, D.G. Schlom, L.Q. Chen, X.X. Xi, K.J. Choi, C.B. Eom, A. Saxena, T. Lookman, and Q.X. Jia, Interfacial coherency and ferroelectricity of BaTiO3/SrTiO3 superlattice films. Appl. Phys. Lett. 91, 112914 (2007).
H. Christen, E.D. Specht, S.S. Silliman, and K.S. Harshavardhan, Ferroelectric and antiferroelectric coupling in superlattices of paraelectric perovskites at room temperature. Phys. Rev. B 68, 020101 (2003).
Q. Zhang, J. Zhai, and L.B. Kong, Relaxor ferroelectric materials for microwave tunable applications. J. Adv. Dielect. 2, 123002 (2012).
W.F. Qin, J. Zhu, J. Xiong, J.L. Tang, W.J. Jie, Y. Zhang, and Y.R. Li, Dielectric characteristics of BST/BZT/BST multilayer. Surf. Rev. Lett. 15, 195 (2008).
M. Liu, C. Ma, J. Liu, G. Collins, C. Chen, F. Xiang, H. Wang, J. He, J. Jiang, E.I. Meletia, and A. Bhalla, Microwave dielectric properties of Mn-doped (Ba, Sr)TiO3//Ba(Zr, Ti)O3 multilayered thin films: optimization of designed structure. Integr. Ferroelectr. 150, 116 (2014).
N.Y. Chan, G.Y. Gao, Y. Wang, and H.L.W. Chan, Preparation and characterizations of Ba(Zr, Ti)O3/(Ba, Sr)TiO3 heterostructures grown on (LaAlO3)0.3(Sr2AlTaO6)0.35 single crystal substrates by pulsed laser deposition. Thin Solid Films 518, e82 (2010).
O. Nakagawara, T. Shimuta, T. Makino, and S. Arai, Epitaxial growth and dielectric properties of (111) oriented BaTiO3/SrTiO3 superlattices by pulsed-laser deposition. Appl. Phys. Lett. 77, 3257 (2000).
J. Wang, F. Guan, L. Cui, J. Pan, Q. Wang, and L. Zhu, Achieving high electric energy storage in a polymer nanocomposite at low filling ratios using a highly polarizable phthalocyanine interphase. J. Polym. Sci. Part B Polym. Phys. 52, 1669 (2014).
Y. Gao, H. Liu, Z. Yao, H. Hao, Z. Yu, and M. Cao, Effect of layered structure on dielectric properties and energy storage density in xBa0.7Sr0.3TiO3–SrTiO3 multilayer ceramics. Ceram. Int. 43, 8418 (2017).
K.M. Johnson, Variation of dielectric constant with voltage in ferroelectrics and its application to parametric devices. J. Appl. Phys. 33, 2826 (1962).
A.F. Devonshire, Theory of barium titanate. Philos. Mag. 40, 1040 (1949).
Y.-C. Liang, C.-L. Huang, and C.-Y. Hu, Effects of growth temperature on structure and electrical properties of dielectric (Ba, Sr)TiO3 capacitors with transparent conducting oxide electrodes. J. Alloys Compd. 509, 7948 (2011).
X.G. Tang, R.K. Zheng, Y.P. Jiang, and H.L.W. Chan, Dielectric properties of (100)-oriented Ba (Zr, Ti)O3/La0.7Ca0.3MnO3 heterostructure thin films prepared by pulsed laser deposition. J. Phys. D Appl. Phys. 39, 3394 (2006).
A.R. James, and C. Prakash, Ferroelectric properties of pulsed laser deposited Ba(Zr0.15Ti0.85)O3 thin films. Appl. Phys. Lett. 84, 1166 (2004).
T. Bayrak, C.O. Akgun, and E. Godlenberg, Structural, optical and electrical characteristics BaSrTiOx thin films: effect of deposition pressure and annealing. J. Non-Cryst. Solids 475, 76 (2017).
X.G. Tang, X.X. Wang, K.H. Wong, and H.L.W. Chan, Effects of texture on the dielectric properties of Ba(Zr0.2Ti0.8)O3 thin films prepared by pulsed laser deposition. Appl. Phys. A 81, 1253 (2005).
S. Yu, C. Zhang, M. Wu, H. Dong, and L. Li, Ultra-high energy density thin-film capacitors with high power density using BaSn0.15Ti0.85O3/Ba0.6Sr0.4TiO3 heterostructure thin films. J. Power Sources 412, 648 (2019).
Z. Sun, L. Wang, M. Liu, C. Ma, Z. Liang, Q. Fan, L. Lu, X. Lou, H. Wang, and C. Jia, Interface-thickness optimization of lead-free oxide multilayer capacitors for high-performance energy storage. J. Mater. Chem. A 6, 1858 (2018).
Acknowledgments
The authors acknowledge financial support from the Defence Research and Development Organization, Ministry of Defence, New Delhi for carrying out the present work. Also, the authors would like to thank the Director of Defence Metallurgical Research laboratory (DMRL) for permitting publication of this work.
Author information
Authors and Affiliations
Corresponding author
Ethics declarations
Conflict of interest
On behalf of all authors, the corresponding author states that there is no conflict of interest.
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
About this article
Cite this article
Mahesh, M.L.V., Pal, P., Prasad, V.V.B. et al. Improved Tunability and Energy Storage Density Properties of Low-Loss, Lead-Free (Ba0.50Sr0.50)TiO3 and Ba(Zr0.15Ti0.85)O3 Bilayer Thin Film Stacks. J. Electron. Mater. 51, 727–735 (2022). https://doi.org/10.1007/s11664-021-09329-1
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11664-021-09329-1