GaAs-based metal-oxide semiconductor field-effect transistors with Al₂O₃ gate dielectrics grown by atomic layer deposition

Abstract

We demonstrate GaAs-based, metal-oxide-semiconductor field-effect transistors (MOSFETs) with excellent performance using an Al₂O₃ gate dielectric, deposited by atomic layer deposition (ALD). This achievement is very significant because Al₂O₃ possesses highly desirable physical and electrical properties as a gate dielectric. These MOSFET devices exhibit extremely low gate-leakage current, high transconductance, and high dielectric breakdown strength. A short-circuit, current-gain, cutoff frequency (f_T) of 14 GHz and a maximum oscillation frequency (f_max) of 25.2 GHz have been achieved from a 0.65-µm gate-length device. The interface trap density (D_it) of Al₂O₃/GaAs is evaluated by the hysteresis of drain-source current, I_ds, versus gate-source bias, V_gs, and the frequency dispersion of transconductance, g_m.