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Catalyst Enhanced Chemical Vapor Deposition of Nickel on Polymer Surface

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Abstract

Catalyst enhanced chemical vapor deposition of nickel film on high Tg polymers such as teflon (PTFE), polyimide(PI), and polysulfone(PS) was investigated by hot wall and cold wall CVD, in which Ni(dmg)2, Ni(acac)2, Ni(hfac)2, Ni(TMHD)2, and Ni(cp)2 are used as precursors, and palladium complexes are used as catalysts. The films obtained were shiny with silvery color. The Ni was metallic and the purity of Ni was about 92%-95% from XPS analysis. SEM micrographs show that the film had good morphology. The conductivity of the film was about 0.5-4 Ω·cm-1. Ni films had good adhesion with polyimide and polysulfone.

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Acknowledgements

The authors thank the National Natural Science Foundation of China (No. 51566005) for financial support. Testing assistance from the Testing Centre of Huazhong University of Science and Technology is gratefully acknowledged.

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Authors and Affiliations

  1. Faculty of Metallurgical and Energy, Kunming University of Science and Technology, Kuming, 650093, China

    Yamian Yu  (俞亚冕), Yiqin Liu & Shan Qing  (卿山)

  2. School of Energy and Power Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China

    Jun Wang

  3. School of Chemistry and Chemical Engineering, Key Laboratory of Material Chemistry for Energy Conversion and Storage (Ministry of Education), Huazhong University of Science and Technology, Wuhan, 430074, China

    Kaichao Yu  (俞开潮)

Authors
  1. Yamian Yu  (俞亚冕)
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  2. Yiqin Liu
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  4. Shan Qing  (卿山)
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  5. Kaichao Yu  (俞开潮)
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Correspondence to Shan Qing  (卿山) or Kaichao Yu  (俞开潮).

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Funded by the National Natural Science Foundation of China (51566005)

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Yu, Y., Liu, Y., Wang, J. et al. Catalyst Enhanced Chemical Vapor Deposition of Nickel on Polymer Surface. J. Wuhan Univ. Technol.-Mat. Sci. Edit. 34, 293–298 (2019). https://doi.org/10.1007/s11595-019-2049-3

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  • DOI: https://doi.org/10.1007/s11595-019-2049-3

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