Abstract
A new microelectromagnetic relay is presented and fabricated based on micromachining technology, aiming at the miniaturization and high manufacturing efficiency of electromagnetic relays. This microrelay is composed of a lower magnetic circuit, a planar exciting coil, and an upper magnetic armature. A complete magnetic circuit is composed, and the “ON” and “OFF” states are controlled by the current of the exciting coil. The dimension of this microrelay is 5 mm × 5 mm × 0.4–mm. The fabrication process mainly includes lithography, sputtering, electroplating, etching, sacrifice-layer technology, etc. Electromagnetic force is calculated theoretically. The calculation results are used for the optimization design of the armature and the number of turns of the exciting coil. A microelectromagnetic relay is fabricated and the initial test results are given. The resistance of the exciting coil is about 300 Ω. The switch-on state resistance is about 1.7 Ω at an exciting current of about 50–mA.
References
Schlaak H. F., Arndt F. and Hanke M., Silicon-microrelay—a small signal relay with electrostatic actuator, Proc. 45th Relay Conf., Lake Buena Vista, FL, 1997, 101–107
Wood R., Mahadevan R., Dhuler V. et al., MEMS microrelays, Mechatronics, 1998, 8(5): 535–547 (August 1)
Zhou J. and Liu B., Magnetic circuit and magnetic field, Publ. Harbin Inst. Technol., 1998, 97–100 (in Chinese)
Zhang Y. and Li D., Fabrication and simulation of an electromagnetic microrelay, Chin. J. Semicond., 2002, 23(12): 1298–1302
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Translated from Journal of Beijing University of Technology, 2004, 30(2) (in Chinese)
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Li, Ds., Liu, Bd. Research on Microelectromagnetic Relays. Front. Mech. Eng. China 1, 111–114 (2006). https://doi.org/10.1007/s11465-005-0013-8
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DOI: https://doi.org/10.1007/s11465-005-0013-8