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Recent progress of hafnium oxide-based ferroelectric devices for advanced circuit applications

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Abstract

Hafnium oxide-based ferroelectric field-effect-transistors (FeFET), which combine super-steep logical switching and low power non-volatile memory functions, have significant potential for post-Moore integrated circuit innovations with higher energy efficiency and larger integration scale. In this review, recent research into hafnium oxide-based ferroelectric (FE) films and different functional devices is presented, from fundamentals to applications. Different technological challenges and state-of-the-art research and development efforts related to the physical understanding and performance optimization of FE films, advanced hafnium oxide-based device integration, and device applications in logic-in-memory and artificial synapses and neurons for neuromorphic computing are addressed.

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Acknowledgements

This work was supported by National Natural Science Foundation of China (Grant Nos. 92064003, 91964202).

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Authors and Affiliations

  1. Integrated Circuit Advanced R&D Center, Institute of Microelectronics of Chinese Academy of Sciences, Beijing, 100029, China

    Zhaohao Zhang, Guoliang Tian, Jiali Huo, Fang Zhang, Qingzhu Zhang, Gaobo Xu, Zhenhua Wu & Huaxiang Yin

  2. School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing, 100049, China

    Zhaohao Zhang, Guoliang Tian, Jiali Huo, Zhenhua Wu & Huaxiang Yin

  3. Department of Electronics, East China Normal University, Shanghai, 200241, China

    Yan Cheng

  4. School of Microelectronics, Xidian University, Xi’an, 710071, China

    Fang Zhang & Yan Liu

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  1. Zhaohao Zhang
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  2. Guoliang Tian
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  4. Fang Zhang
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  9. Yan Liu
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  10. Huaxiang Yin
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Correspondence to Huaxiang Yin.

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Zhang, Z., Tian, G., Huo, J. et al. Recent progress of hafnium oxide-based ferroelectric devices for advanced circuit applications. Sci. China Inf. Sci. 66, 200405 (2023). https://doi.org/10.1007/s11432-023-3780-7

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  • DOI: https://doi.org/10.1007/s11432-023-3780-7

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