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Experiment study on micro-structure on different crystallographic planes of mc-Si etched in alkaline solution

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Abstract

The investigation of multi-crystalline silicon (mc-Si) surface etching technology is a key point in solar cell research. In this paper, mc-Si surface was etched in the common alkaline solution modified by an additive for 20 minutes at 78–80°C. Samples’ surface morphology was observed by scanning electron microscope (SEM). It is firstly found that the etched mc-Si surface has the uniform distribution of trap pits although the morphologies of trap pits are slightly different on different crystallographic planes. Si (100) plane was covered with many small Si-mountain ranges or long V-shape channels arranged in a crisscross pattern. For (110) plane and (111) plane, they were full of a lot of triangle pit-traps (or quadrilateral holes) and twisted earthworm trap pits, respectively. The measured reflectance of the sample was 20.5% at wavelength range of 400–900 nm. These results illustrate that alkaline solution modified by an additive can effectively etch out trap pits with a good trapping light effect on mc-Si surfaces. This method should be very valuable for mc-Si solar cells.

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References

  1. Hua X S, Zhang Y J, Wang H W. The effect of texture unit shape on silicon surface on the absorption properties. Sol Energy Mater Sol Cells, 2010, 94(2): 258–262

    Article  Google Scholar 

  2. Spiegel M, Gerhards C, Huster F, et al. Industrially attractive front contact formation methods for mechanically V-textured multicry-stalline silicon solar cells. Sol Energy Mater Sol Cells, 2002, 74(1–4): 175–182

    Google Scholar 

  3. Dobrzański L, Drygala A. Laser processing of multicrystalline silicon for texturization of solar cells. J Mater Process Technol, 2007, 191(1–3): 228–231

    Article  Google Scholar 

  4. Ruby D, Zaidi S, Narayanan S, et al. RIE-texturing of industrial multicrystalline silicon solar cells. J Sol Energy Eng, 2005, 127: 146–149

    Article  Google Scholar 

  5. Lee K, Ha M H, Kim J H, et al. Damage-free reactive ion etch for high-efficiency large-area multi-crystalline silicon solar cells. Sol Energy Mater Sol Cells, 2011, 95: 66–68

    Article  Google Scholar 

  6. Kim K, Dhungel S K, Jung S, et al. Texturing of large area multi-crystalline silicon wafers through different chemical approaches for solar cell fabrication. Sol Energy Mater Sol Cells, 2008, 92(8): 960–968

    Article  Google Scholar 

  7. Weinreich W, Acker J, Gräber I. The effect of H2SiF6 on the surface morphology of textured multi-crystalline silicon. Semicond Sci Technol, 2006, 21: 1278–1286

    Article  Google Scholar 

  8. An J, Shi Y, Liu Z G, et al. The influence of NH4 F on silicon etching in HF/HNO3/H2O system. Proc ISES World Congress 2007 (Vol. I–Vol. V), 2009, 4: 1051–1054

    Google Scholar 

  9. Park S W, Kim J. Application of acid texturing to multi-crystalline silicon wafers. J Korean Phys Soci, 2003, 43(3): 423–426

    Google Scholar 

  10. Panek P, Lipiński M, Dutkiewicz J. Texturization of multicrystalline silicon by wet chemical etching for silicon solar cells. J Mater Sci, 2005, 40(6): 1459–1463

    Article  Google Scholar 

  11. González-Díaz B, Guerrero-Lemus R, Díaz-Herrera B, et al. Optimization of roughness, reflectance and photoluminescence for acid textured mc-Si solar cells etched at different HF/HNO3 concentrations. Mater Sci Eng: B, 2009, 159–160: 295–298

    Article  Google Scholar 

  12. Zubel I, Kramkowska M. Development of etch hillocks on different Si (h k l) planes in silicon anisotropic etching. Surf Sci, 2008, 602(9): 1712–1721

    Google Scholar 

  13. Zubel I, Kramkowska M. Etch rates and morphology of silicon (h k l) surfaces etched in KOH and KOH saturated with isopropanol solutions. Sens Actuators A: Phys, 2004, 115(2–3): 549–556

    Article  Google Scholar 

  14. Hylton J D, Burgers A R, Sinke W C. Alkaline etching for reflectance reduction in multicrystalline silicon solar cells. J Electrochem Soci, 2004, 151(6): G408–G427

    Article  Google Scholar 

  15. Gosálvez M A, Sato K, Foster A S, et al. An atomistic introduction to anisotropic etching. J Micromech Microeng, 2007, 17(4): S1–S26

    Article  Google Scholar 

  16. Gangopadhyay U, Dhungel S K, Kim K, et al. Novel low cost chemical texturing for very large area industrial multi-crystalline silicon solar cells. Semicond Sci Technol, 2005, 20(9): 938–946

    Article  Google Scholar 

  17. Abburi M, Boström T, Olefjord I. Electrochemical texturing of multicrystalline silicon wafers in alkaline solution. In: 24th European Photovoltaic Solar Energy Conference, Hamburg, Germany, 2009. 1779–1783

  18. Zhou C L, Wang W J, Zhao L, et al. Preparation and characterization of homogeneity and fine pyramids on the textured single silicon crystal (in Chinese). Acta Phys Sin, 2010, 59(8): 5777–5782

    Google Scholar 

  19. Basu P K, Dhasmana H, Udayakumar N, et al. Regulated low cost pre-treatment step for surface texturization of large area industrial single crystalline silicon solar cell. Sol Energy Mater Sol Cells, 2010, 94(6): 1049–1054

    Article  Google Scholar 

  20. Shayan M, Merati A R, Arezoo B, et al. Study on atomistic model for simulation of anisotropic wet etching. J Micro/Nanolith MEMS MOEMS, 2011, 10(2): 029701-1–029701-6

    Article  Google Scholar 

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Correspondence to ShiMeng Feng.

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Wang, K., Feng, S., Xu, H. et al. Experiment study on micro-structure on different crystallographic planes of mc-Si etched in alkaline solution. Sci. China Technol. Sci. 55, 1509–1514 (2012). https://doi.org/10.1007/s11431-012-4807-8

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  • DOI: https://doi.org/10.1007/s11431-012-4807-8

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