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Phase control of ellipsometric interferometer for nanometric positioning system

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Abstract

Development in industry is asking for improved resolution and higher accuracy in dimensional metrology. In this paper, we proposed a control displacement method based on a polarization ellipsometirc interferometer and phase-locked loop technique. The proposed principle was set up. The experimental results of step and step displacements with a step value of 5 nm were presented. We also analyzed the resolution, the potential minimal displacement of the established system. The results show that the position error induced by the ellipticty deviation of the light beam becomes negligible thanks to our signal processing circuit with high-order filter. This method could be useful for many applications in nano dimensional metrology and semiconductor industry.

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References

  1. Misumi I, Gonda S, Kurosawa T, et al. Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope. Meas Sci Technol, 2003, 14: 463–471

    Article  Google Scholar 

  2. Tyrrell J, Dal Savio C, Krüger-Sehm R, et al. Development of a combined interference microscope objective and scanning probe microscope. Rev Sci Instrum, 2004, 75: 1120–1126

    Article  Google Scholar 

  3. Ruijl T. Ultra Precision Coordinate Measuring Machine; Design, Calibration and Error Compensation. Dissertation of Doctoral Degree. Delft: Delft University of Technology, 2001

    Google Scholar 

  4. Teague E. The national institute of standards and technology molecular measuring machine project: Metrology and precision engineering design. Vac Technol, 1989, B7: 1898–1902

    Article  Google Scholar 

  5. Kramar J A. Nanometer resolution metrology with the molecular measuring machine. Meas Sci Technol, 2005, 16: 2121–2128

    Article  Google Scholar 

  6. Zhao K G, Buechner H J. Metrological atomic force microscope with zero abbe offset (in Chinese). Acta Metrologica Sinica, 2002, 23: 87–89

    Google Scholar 

  7. Leach R, Haycocks J, Jackson K, et al. Advances in traceable nanometrology at the National Physical Laboratory. Nanotech, 2001, 12: R1–R6

    Article  Google Scholar 

  8. Liu Z, Li Y. Development of large range nano-positioning system used in metrological scanning microscope (in Chinese). J Optoelect Laser, 2010, 21: 957–962

    Google Scholar 

  9. Jie D G, Liu Y J, Sun L N, et al. Modeling and control of a macromicrodual-drive ultra-precision positioning mechanism (in Chinese). Opt Precis Eng, 2005, 13: 171–178

    Google Scholar 

  10. Liu H Z, Ding Y C, Lu B H, et al. Research on muti-step positioning for nano imprint lithography (in Chinese). J Xi’an Jiaotong Univ, 2006, 40: 261–269

    Google Scholar 

  11. Duan Z Y, Wang Q K. Development of a displacement positioning platform of a novel nanometer resolution (in Chinese). Nanotech Precis Eng, 2005, 3: 178–180

    Google Scholar 

  12. Liu Y J, Li T, Sun L N. Design of a control system for a macro-micro dual-drive high acceleration high precision positioning stage for IC packaging. Sci China Ser E-Tech Sci, 2009, 52: 1858–1865

    Article  MathSciNet  MATH  Google Scholar 

  13. Topcu S, Chassagne L, Haddad D, et al. Heterodyne interferometric technique for displacement control at the nanometric scale. Rev Sci Instrum, 2003, 74: 4876–4880

    Article  Google Scholar 

  14. Sinno A, Ruaux P, Chassagne L, et al. Enlarged atomic force microscopy scanning scope: Novel sample-holder device with millimeter range. Rev Sci Instrum, 2007, 78: 095107 (1–7)

    Article  Google Scholar 

  15. Xu S, Ouedraogo K, Chassagne L, et al. Polarimetric interferometer for nanoscale positioning applications. Rev Sci Instrum, 2008, 79: 125104 (1–6)

    Article  Google Scholar 

  16. Birch K P, Downs M J. An updated Edlen Equation for the refractive index of air. Metrologia, 1993, 30: 155–162

    Article  Google Scholar 

  17. Bobroff N. Recent advances in displacement measuring interferometry. Meas Sci Technol, 1993, 4: 907–926

    Article  Google Scholar 

  18. Chassagne L, Wakim M, Xu S, et al. A 2D nano-positiong system with sub-nanometric repeatability over the millimetre displacement range. Meas Sci Technol, 2007, 18: 3267–3272

    Article  Google Scholar 

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Authors and Affiliations

  1. College of Mechanical and Electrical Engineering, China Jiliang University, Hangzhou, 310018, China

    SuAn Xu, ShaoJun Zhong & YanYan Huang

  2. LISV, University of Versailles Saint-Quentin, Versailles cedex, 78035, France

    Luc Chassagne & Suat Topcu

Authors
  1. SuAn Xu
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  2. Luc Chassagne
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  3. Suat Topcu
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  4. ShaoJun Zhong
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  5. YanYan Huang
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Correspondence to SuAn Xu.

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Xu, S., Chassagne, L., Topcu, S. et al. Phase control of ellipsometric interferometer for nanometric positioning system. Sci. China Technol. Sci. 54, 3424–3430 (2011). https://doi.org/10.1007/s11431-011-4527-5

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  • DOI: https://doi.org/10.1007/s11431-011-4527-5

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