Abstract
Nano-patterns made of poly(methyl methacrylate) (PMMA) were fabricated on silicon wafer using a capillarity-directed soft lithographic technique. Patterns with three different aspect ratios were investigated for their adhesion and friction properties at nano-scale and for friction at micro-scale. The patterned samples exhibited superior tribological properties, at both these scales when compared to those of flat PMMA thin films.
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Acknowledgments
This research was supported by a grant (05 K1401 – 00930) from Center for Nano-scale Mechatronics and Manufacturing of 21st Century Frontier Research Program. This work was also supported in part by the Micro Thermal System Research Center and Engineering Research Institute of Seoul National University.
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Yoon, ES., Singh, R., Kong, H. et al. Tribological properties of bio-mimetic nano-patterned polymeric surfaces on silicon wafer. Tribol Lett 21, 31–37 (2006). https://doi.org/10.1007/s11249-005-9005-4
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DOI: https://doi.org/10.1007/s11249-005-9005-4