The coatings based on ZrN are formed by the vacuum-arc plasma-assisted process under the conditions of plasma filtering from the droplet phase. A comprehensive investigation of the coating properties, elemental and phase compositions, and structure is performed by the methods of present-day materials science. The modes of deposition, at which the resulting coatings exhibit the lowest roughness (0.03 μm), the highest hardness (up to 30.5 GPa), a relatively low friction coefficient (0.39), and a low wear parameter (up to 2.2·10–6 mm3/(N·m)), are determined. Using the X-ray diffraction data, it is identified that the coatings consist of ZrN-crystallites with a cubic-lattice.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
A. A. Andreev, L. P. Sablev, V. M. Shulaev, and S. N. Grigoriev, Vacuum-Arc Facilities and Coatings [in Russian], NNC KHFTI, Kharkov (2005).
O. V. Krysina, Yu. F. Ivanov, I. M. Goncharenko, et al., High Temp. Mater. Process., 17(2–3), 153–160 (2013).
Yu. F. Ivanov, N. N. Koval, O. V. Krysina, et al., Surf. Coat. Technol., 207, 430–434 (2012).
V. A. Barvinok and V. I. Bogdanovich, Physical Foundations and Mathematical Modeling of Processes of Vacuum Ion-Plasma Deposition [in Russian], Mashinostroyeniye, Moscow (1999).
A. Anders, Cathodic Arcs: From Fractal Sports to Energetic Condensation, Springer, N. Y. (2008).
D. S. Aksenov, I. I. Aksenov, and V. E. Strelnitskii, Vopr. Atom. Nauki i Tekhn., No. 2, 190–202 (2007).
L. G. Vintizenko, S. V. Grigoriev, N. N. Koval, et al., Russ. Phys. J., 44, No. 9, 927–936 (2001).
O. V. Sobol’, A. A. Andreev, V. F. Gorban’, et al., Tech. Phys., 86, Iss. 7, 100–103 (2016).
Yu. S. Kotov and, G. Ya. Belyaev, Russian-Belorussian University Bulletin [in Russian], No. 2(39), 63–70 (2013).
A. D. Pogrebnyak, O. V. Sobol’, et al., Pis’ma ZhTF, 35, Iss. 19, 103–110 (2009).
S. Ya., Betsofen, L. M. Petrov, A. A. Ilyin, et al., Poverhnost. Rentg., Sinhrotr., Neytron. Issled., No. 1, 39–45 (2004).
A. A. Kalushevich, N. N. Koval, V. V. Denisov, et al., Izv. Vyssh. Uchebn. Zaved. Fiz., 55, No. 12/3, 118–122 (2012).
O. V. Krysina, N. N. Koval, I. V. Lopatin, et al., J. Phys.: Conf. Ser., 669, 012032 (2016).
A. I. Dodonov and V. M. Bashkov, Generation of Electric-Arc Plasma in a Curvilinear Plasma Guide and Deposition of a Coating on a Substrate, RF Patent of Invention, RU 97/00106 (04.04.1997).
V. V. Shugurov, N. N. Koval, N. A. Prokopenko, Izv. Vyssh. Uchebn. Zaved. Fiz., 58, No. 9/2, 283–286 (2015).
Author information
Authors and Affiliations
Corresponding author
Additional information
Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 5, pp. 106–111, May, 2019.
Rights and permissions
About this article
Cite this article
Krysina, O.V., Shugurov, V.V., Prokopenko, N.A. et al. Synthesis of Single-Layer ZrN-Coatings Using Vacuum-Arc Plasma-Assisted Deposition with Plasma Flow Filtering. Russ Phys J 62, 848–853 (2019). https://doi.org/10.1007/s11182-019-01786-w
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11182-019-01786-w