Skip to main content
Log in

Improved performance of AlGaN solar-blind avalanche photodiodes with dual multiplication layers

  • Published:
Optical and Quantum Electronics Aims and scope Submit manuscript

Abstract

A back-illuminated separate absorption and multiplication (SAM) solar-blind ultraviolet (UV) avalanche photodiode (APD) with a low-Al-content p-graded AlxGa1-xN layer and a high/low-Al-content heterogeneous dual multiplication region is designed. An n-type insertion layer is inserted between the high/low-Al-content heterostructure dual multiplication region to adjust the polarization electric field between the dual multiplication layers. The AlGaN APD with dual multiplication layers exhibits a high hole ionization coefficient due to the existence of the low-Al-content Al0.3Ga0.7 N layer in the high/low-Al-content heterostructure multiplication region. Furthermore, the polarization effect between the high/low-Al-content AlGaN dual multiplication layers can make the polarization electric field in the dual multiplication layers consistent with the direction of the applied electric field, and the polarization doping effect of the p-type graded AlxGa1-xN layer also helps to reduce the breakdown voltage of the designed APD. The calculation results show that the avalanche multiplication gain and breakdown voltage of the AlGaN solar-blind UV APD with dual multiplication layers is 9.4 × 103 and 96.9 V, respectively. It is demonstrated that the gain of the designed APD with dual multiplication layers is 222% higher than that of the conventional APD, and the breakdown voltage is also reduced.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7

Similar content being viewed by others

Data availability

The data that support the findings will be available from the corresponding author upon reasonable request.

References

  • Bellotti, E., Bertazzi, F., Shishehchi, S., Matsubara, M., Goano, M.: Theory of carriers transport in III-nitride materials: state of the art and future outlook. IEEE Trans. Electron Devices 60(10), 3204–3215 (2013)

    Article  ADS  Google Scholar 

  • Cai, Q., Luo, W.K., Guo, H., Wang, J., Tang, Y., Xue, J.J., Li, Q., Li, M., Chen, D.J., Lu, H., Zhang, R., Zheng, Y.D.: Direct observation of reach-through behavior in back-illuminated algan avalanche photodiode with separate absorption and multiplication structure. J. Phys. D Appl. Phys. 53(42), 425101 (2020)

    Article  ADS  Google Scholar 

  • Dong, K.X., Chen, D.J., Wang, Y.J., Shi, Y.H., Yu, W.J., Shi, J.P.: AlGaN solar-blind avalanche photodiodes with p-type hexagonal boron nitride. IEEE Photon. Technol. Lett. 30(24), 2131–2134 (2018)

    Article  ADS  Google Scholar 

  • Fred Schubert, E., Kim, J.K.: Solid-state light sources getting smart. Science 308(5726), 1274–1278 (2005)

    Article  ADS  Google Scholar 

  • Gunning, B.P., Fabien, C.A.M., Merola, J.J., Clinton, E.A., Doolittle, W.A., Wang, S., Fischer, A.M., Ponce, F.A.: Comprehensive study of the electronic and optical behavior of highly degenerate p-type Mg-doped GaN and AlGaN. J. Appl. Phys. 117(4), 045710 (2015)

    Article  ADS  Google Scholar 

  • Huang, Y., Chen, D.J., Lu, H., Dong, K.X., Zhang, R., Zheng, Y.D., Li, L., Li, Z.H.: Back-illuminated separate absorption and multiplication AlGaN solar-blind avalanche photodiodes. Appl. Phys. Lett. 101(25), 253516 (2012)

    Article  ADS  Google Scholar 

  • Jiang, X.C., Xie, F., Gu, Y., Dong, X.H., Zhang, X.M., Zhu, C., Qian, W.Y., Lu, N.Y., Chen, G.Q., Yang, G.F.: L-cysteine functionalized Al0.18Ga0.82N/GaN high electron mobilty transistor sensor for copper ion detection. IEEE Trans. Electron Devices 69(6), 3367–3372 (2022)

    Article  ADS  Google Scholar 

  • McClintock, R., Yasan, A., Minder, K., Kung, P., Razeghi, M.: Avalanche multiplication in AlGaN based solar-blind photodetectors. Appl. Phys. Lett. 87(24), 241123 (2005)

    Article  ADS  Google Scholar 

  • McClintock, R., Pau, J.L., Minder, K., Bayram, C., Kung, P., Razeghi, M.: Hole-initiated multiplication in back-illuminated GaN avalanche photodiodes. Appl. Phys. Lett. 90(14), 141112 (2007)

    Article  ADS  Google Scholar 

  • Moresco, S.L., Bertazzi, F., Bellotti, E.: Theory of high field carrier transport and impact ionization in wurtzite GaN Part II: application to avalanche photodetectors. J. Appl. Phys. 106(6), 063719 (2009)

    Article  ADS  Google Scholar 

  • Pau, J.L., McClintock, R., Minder, K., Bayram, C., Kung, P., Razeghi, M., Muñoz, E., Silversmith, D.: Geiger-mode operation of back-illuminated GaN avalanche photodiodes. Appl. Phys. Lett. 91(4), 041104 (2007)

    Article  ADS  Google Scholar 

  • Pau, J.L., Bayram, C., McClintock, R., Razeghi, M., Silversmith, D.: Back-illuminated separate absorption and multiplication GaN avalanche photodiodes. Appl. Phys. Lett. 92(10), 101120 (2008)

    Article  ADS  Google Scholar 

  • Shao, Z.G., Yang, X.F., You, H.F., Chen, D.J., Lu, H., Zhang, R., Zheng, Y.D., Dong, K.X.: Ionization-enhanced AlGaN heterostructure avalanche photodiodes. IEEE Electron Device Lett. 38(4), 485–488 (2017)

    Article  ADS  Google Scholar 

  • Vashaei, Z., Cicek, E., Bayram, C., McClintock, R., Razeghi, M.: GaN avalanche photodiodes grown on m-plane freestanding GaN substrate. Appl. Phys. Lett. 96(20), 201908 (2010)

    Article  ADS  Google Scholar 

  • Wang, D.H., Liu, X., Kang, Y., Wang, X.N., Wu, Y.P., Fang, S., Yu, H.B., Memon, M.H., Zhang, H.C., Hu, W., Mi, Z.T., Fu, L., Sun, H.D., Long, S.B.: Bidirectional photocurrent in p-n heterojuction nanowires. Nat. Electron. 4(9), 645–652 (2021)

    Article  Google Scholar 

  • Xu, Q.J., Zhang, S.Y., Liu, B., Li, Z.H., Tao, T., Xie, Z.L., Xiu, X.Q., Chen, D.J., Chen, P., Han, P., Wang, K., Zhang, R., Zheng, Y.L.: Mg acceptor activation mechanism and hole transport characteristics in highly Mg-doped AlGaN alloys. Chin. Phys. B 29(5), 058103 (2020)

    Article  ADS  Google Scholar 

  • Yang, G.F., Zhang, Q., Wang, J., Gao, S.M., Zhang, R., Zheng, Y.D.: Analysis of 270/290/330-nm AlGaN-based deep ultraviolet light-emitting diodes with different Al content in quantum wells and barriers. IEE Photon. J. 7(6), 2200707 (2015)

    Article  Google Scholar 

  • Yang, G.F., Li, Y.H., Liu, Y.S., Xie, F., Gu, Y., Yang, X.F., Wei, C.L., Bian, B.A., Zhang, X.M., Lu, N.Y.: Surface modification of AlGaN solar-blind ultraviolet MSM photodetectors with Octadecanethiol. IEEE Trans. Electron Devices 69(1), 195–200 (2022)

    Article  ADS  Google Scholar 

  • Yao, C.J., Ye, X.C., Sun, R., Yang, G.F., Wang, J., Lu, Y.N., Yang, P.F., Cao, J.T., Gao, S.M.: High-performance AlGaN-based solar-blind avalanche photodiodes with dual-periodic III-nitride distributed Bragg reflectors. Appl. Phys. Express 10(3), 034302 (2017a)

    Article  ADS  Google Scholar 

  • Yao, C.J., Ye, X.C., Sun, R., Yang, G.F., Wang, J., Lu, Y.A., Yan, P.F., Cao, J.T.: AlGaN solar-blind avalanche photodiodes with AlInN/AlGaN distributed Bragg reflectors. Appl. Phys. A Mater. Sci. Process. 123(6), 439 (2017b)

    Article  ADS  Google Scholar 

  • Yao, Y.F., Jiang, X.C., Gu, Y., Yang, G.F., Wei, C.L., Xie, Z.J., Zhang, Q., Qian, W.Y., Zhu, C.: AlGaN-based solar-blind avalanche photodetectors with gradually doped charge layer. Int. J. Number. Model. 35, e3028 (2022)

    Google Scholar 

  • You, H.F., Shao, Z.G., Wang, Y.R., Hu, L.Q., Chen, D.J., Lu, H., Zhang, R., Zheng, Y.D.: Fine control of the electric field distribution in the heterostructure multiplication region of AlGaN avalanche photodiodes. IEEE Photon. J. 9(3), 6802007 (2017)

    Article  Google Scholar 

  • Zhang, H.C., Liang, H.Z., Song, K., Xing, C., Wang, D.H., Yu, Y.B., Huang, C., Sun, Y., Yang, L., Zhao, X.L., Sun, H.D., Long, S.B.: Demonstration of AlGaN/GaN-based ultraviolet phototransistor with a record high responsivity over 3.6×107 A/W. Appl. Phys. Lett. 118(24), 242105 (2021)

    Article  ADS  Google Scholar 

Download references

Funding

This work was funded by the National Natural Science Foundation of China (No. 61974056, 62174016), the Key Research and Development Program of Jiangsu Province (No. BE2020756), the Natural Science Foundation of Jiangsu Province (No. BK20190576), Suzhou Science and Technology Project (No. SZS2020313), the Fundamental Research Funds for Central Universities (No. JUSRP22032), the Science and Technology Development Foundation of Wuxi (No. N20191002), and the Postgraduate Research & Practice Innovation Program of Jiangsu Province (No. KYCY20_1769).

Author information

Authors and Affiliations

Authors

Contributions

Miss Jiarui Guo, Dr. Feng Xie, and Prof. Guofeng Yang contributed to the conceptualization, Writing—original draft, and writing—review & editing of the manuscript; Dr.Yan Gu, Mr. Xuecheng Jiang, and Mr. Chunlei Wei contributed to the data curation and formal analysis of the of the manuscript; Mr. Zhijian Xie, Qi Zhang, Dr. Weiying Qiang, Chun Zhu, and Xiumei Zhang contributed to the methodology and formal analysis of the manuscript.

Corresponding author

Correspondence to Guofeng Yang.

Ethics declarations

Competing interests

The authors declare no competing interests.

Additional information

Publisher's Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Guo, J., Xie, F., Gu, Y. et al. Improved performance of AlGaN solar-blind avalanche photodiodes with dual multiplication layers. Opt Quant Electron 55, 139 (2023). https://doi.org/10.1007/s11082-022-04400-5

Download citation

  • Received:

  • Accepted:

  • Published:

  • DOI: https://doi.org/10.1007/s11082-022-04400-5

Keywords

Navigation