Abstract
In this work, single-shot craters were produced by femtosecond laser ablation using an objective with a numerical aperture NA = 0.25 and laser pulses with the 0.3-ps width and the central wavelength of 515 nm. Ablation was performed in air and distilled water. A sample, 65-nm thick silver film, was prepared by magnetron sputtering onto silica glass and crystalline silicon substrates. Craters were visualized by a scanning electron microscope. Some differences were found in the morphology of craters, depending on the substrate and on the ambient medium. A drastic increase in the crater size was observed during the ablation in water, which is explained by filamentation that occurs when the peak pulse power exceeds 1.3 MW.
Similar content being viewed by others
References
Amendola, V., Scaramuzza, S., Carraro, F., Cattaruzza, E.: Formation of alloy nanoparticles by laser ablation of Au/Fe multilayer films in liquid environment. J. Colloid Interface Sci. 489, 18–27 (2017). https://doi.org/10.1016/j.jcis.2016.10.023
Chichkov, B.N., Momma, C., Nolte, S., von Alvensleben, F., Tünnermann, A.: Femtosecond, picosecond and nanosecond laser ablation of solids. Appl. Phys. A 63, 109–115 (1996). https://doi.org/10.1007/BF01567637
Daminelli, G., Krüger, J., Kautek, W.: Femtosecond laser interaction with silicon under water confinement. Thin Solid Films 467(1–2), 334–341 (2004). https://doi.org/10.1016/j.tsf.2004.04.043
Danilov, P.A., Zayarnyi, D.A., Ionin, A.A., Kudryashov, S.I., Makarov, S.V., Rudenko, A.A., Yurovskikh, V.I., Kulchin, YuN, Vitrik, O.B., Kuchmizhak, A.A., Drozdova, E.A., Odinokov, S.B.: Mechanisms of formation of sub-and micrometre-scale holes in thin metal films by single nano- and femtosecond laser pulses. Quantum Electron. 44(6), 540 (2014). https://doi.org/10.1070/QE2014v044n06ABEH015426
Dubietis, A., Couairon, A., Kučinskas, E., Tamošauskas, G., Gaižauskas, E., Faccio, D., Di Trapani, P.: Measurement and calculation of nonlinear absorption associated with femtosecond filaments in water. Appl. Phys. B 84(3), 439–446 (2006). https://doi.org/10.1007/s00340-006-2249-3
Gattass, R.R., Mazur, E.: Femtosecond laser micromachining in transparent materials. Nat. Photon. 2(4), 219–225 (2008)
Gordon, R., Brolo, A.G., Sinton, D., Kavanagh, K.L.: Resonant optical transmission through hole-arrays in metal films: physics and applications. Laser Photon. Rev. 4(2), 311–335 (2010). https://doi.org/10.1002/lpor.200810079
Götze, M., Farhan, A.M., Kürbitz, T., Krimig, O., Henning, S., Heilmann, A., Hillrichs, G.: Laser processing of dry, wet and immersed polyamide nanofiber nonwovens with different laser sources. J. Laser Micro/Nanoeng. 12(3), 286–295 (2017). https://doi.org/10.2961/jlmn.2017.03.0019
Helle, M.H., Jones, T.G., Peñano, J.R., Kaganovich, D., Ting, A.: Formation and propagation of meter-scale laser filaments in water. Appl. Phys. Lett. 103, 121101 (2013). https://doi.org/10.1063/1.4821447
Koch, J., Korte, F., Fallnich, C., Ostendorf, A., Chichkov, B.N.: Direct-write subwavelength structuring with femtosecond laser pulses. Opt. Eng. 44(5), 051103 (2005a). https://doi.org/10.1117/1.1904053
Koch, J., Korte, F., Bauer, T., Fallnich, C., Ostendorf, A., Chichkov, B.N.: Nanotexturing of gold films by femtosecond laser-induced melt dynamics. Appl. Phys. A 81(2), 325–328 (2005b). https://doi.org/10.1007/s00339-005-3212-6
Kovačević, A.G., Petrović, S., Bokić, B., Gaković, B., Bokorov, M.T., Vasić, B., Jelenković, B.M.: Surface nanopatterning of Al/Ti multilayer thin films and Al single layer by a low-fluence UV femtosecond laser beam. Appl. Surf. Sci. 326, 91–98 (2015). https://doi.org/10.1016/j.apsusc.2014.10.180
Kuchmizhak, A., Pustovalov, E., Syubaev, S., Vitrik, O., Kulchin, Y., Porfirev, A., Ionin, A.: On-fly femtosecond-laser fabrication of self-organized plasmonic nanotextures for chemo-and biosensing applications. ACS Appl. Mater. Interfaces. 8(37), 24946–24955 (2016). https://doi.org/10.1021/acsami.6b07740
Kuchmizhak, A.A., Porfirev, A.P., Syubaev, S.A., Danilov, P.A., Ionin, A.A., Vitrik, O.B., Kudryashov, S.I.: Multi-beam pulsed-laser patterning of plasmonic films using broadband diffractive optical elements. Opt. Lett. 42(14), 2838–2841 (2017). https://doi.org/10.1364/OL.42.002838
Kudryashov, S.I., Mourou, G., Joglekar, A., Herbstman, J.F., Hunt, A.J.: anochannels fabricated by high-intensity femtosecond laser pulses on dielectric surfaces. Appl. Phys. Lett. 91, 141111 (2007). https://doi.org/10.1063/1.2790741
Kudryashov, S.I., Gakovic, B., Danilov, P.A., Petrovic, S.M., Milovanovic, D., Rudenko, A.A., Ionin, A.A.: Single-shot selective femtosecond laser ablation of multi-layered Ti/Al and Ni/Ti films:“Cascaded” heat conduction and interfacial thermal effects. Appl. Phys. Lett. 112(2), 023103 (2018). https://doi.org/10.1063/1.5010793
Kulchin, Y.N., Vitrik, O.B., Kuchmizhak, A.A., Savchuk, A.G., Nepomnyashchii, A.A., Danilov, P.A., Rudenko, A.A., Zayarnyi, D.A., Ionin, A.A., Kudryashov, S.I., Makarov, S.V., Yurovskikh, V.I., Samokhin, A.A.: Formation of nanobumps and nanoholes in thin metal films by strongly focused nanosecond laser pulses. J. Exp. Theor. Phys. 119(1), 15–23 (2014). https://doi.org/10.1134/S1063776114060156
Kuznetsov, A.I., Koch, J., Chichkov, B.N.: Nanostructuring of thin gold films by femtosecond lasers. Appl. Phys. A 94(2), 221–230 (2009a). https://doi.org/10.1007/s00339-008-4859-6
Kuznetsov, A.I., Koch, J., Chichkov, B.N.: Laser-induced backward transfer of gold nanodroplets. Opt. Express 17(21), 18820–18825 (2009b). https://doi.org/10.1364/OE.17.018820
Kuznetsov, A.I., Evlyukhin, A.B., Reinhardt, C., Seidel, A., Kiyan, R., Cheng, W., Chichkov, B.N.: Laser-induced transfer of metallic nanodroplets for plasmonics and metamaterial applications. JOSA B 26(12), B130–B138 (2009c). https://doi.org/10.1364/JOSAB.26.00B130
Leitz, K.-H., Redlingshöfer, B., Reg, Y., Otto, A., Schmidt, M.: Metal ablation with short and ultrashort laser pulses. Phys. Procedia 12, 230–238 (2011). https://doi.org/10.1016/j.phpro.2011.03.128
Moening, J.P., Thanawala, S.S., Georgiev, D.G.: Formation of high-aspect-ratio protrusions on gold films by localized pulsed laser irradiation. Appl. Phys. A 95(3), 635–638 (2009). https://doi.org/10.1007/s00339-009-5166-6
Nakata, Y., Miyanaga, N., Okada, T.: Effect of pulse width and fluence of femtosecond laser on the size of nanobump array. Appl. Surf. Sci. 253(15), 6555–6557 (2007). https://doi.org/10.1016/j.apsusc.2007.01.080
Nastulyavichus, N.A., Kudryashov, A.A., Smirnov, A.A., Rudenko, A., Kharin, A.Y., Zayarny, D.A., Ionin, S.I.: Nanosecond-laser plasma-mediated generation of colloidal solutions from silver films of variable thickness: colloidal optical density versus pre-determined ablated mass. Opt. Laser Technol. 111, 75–80 (2019). https://doi.org/10.1016/j.optlastec.2018.09.038
Nguyen, T.T.H., Kudryashov, S.I., Danilov, P.A., Ionin, A.A., Khmelnitskii, R.A., Rudenko, A.A., Saraeva, I.N.: Nano-and microstructured plasmonic substrates for laser and spectral applications. J. Phys: Conf. Ser. 1238, 012030 (2019). https://doi.org/10.1088/1742-6596/1238/1/012030
Pasquier, C., Sentis, M., Utéza, O., Sanner, N.: Predictable surface ablation of dielectrics with few-cycle laser pulse even beyond air ionization. Appl. Phys. Lett. 109(5), 051102 (2016). https://doi.org/10.1063/1.4960152
Shepelev, V.V., Inogamov, N.A., Danilov, P.A., Kudryashov, S.I., Kuchmizhak, A.A., Vitrik, O.B.: Ultrashort pulse action onto thin film on substrate: qualitative model of shock propagation in substrate explaining phenomenon of fast growth of a hole with increase of absorbed energy. J. Phys: Conf. Ser. 1147, 012065 (2019). https://doi.org/10.1088/1742-6596/1147/1/012065
Smirnov, N.A., Kudryashov, S.I., Danilov, P.A., Rudenko, A.A., Ionin, A.A., Nastulyavichus, A.A.: Silicon ablation by single ultrashort laser pulses of variable width in air and water. JETP Lett. 108(6), 368–373 (2018). https://doi.org/10.1134/S002136401818011X
Acknowledgements
This research was supported by the Russian Science Foundation (Grant No. 16-12-10165).
Author information
Authors and Affiliations
Corresponding author
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
This article is part of the Topical Collection on Advanced Photonics Meets Machine Learning.
Guest edited by Goran Gligorić, Jelena Radovanovic and Aleksandra Maluckov.
Rights and permissions
About this article
Cite this article
Smirnov, N.A., Kudryashov, S.I., Danilov, P.A. et al. Femtosecond laser ablation of a thin silver film in air and water. Opt Quant Electron 52, 71 (2020). https://doi.org/10.1007/s11082-019-2169-1
Received:
Accepted:
Published:
DOI: https://doi.org/10.1007/s11082-019-2169-1