Abstract
For the realization of optoelectronic integrated circuits, it is required to incident light perpendicularly to a planar Si photodiode. We propose a high-efficient vertical optical coupler using an amorphous Si optical waveguide grating coupler with top reflector, which is transparent at 850 nm wavelength range. The optical waveguide (width of 300 nm \(\times \) height of 100 nm) coupler is analyzed by using finite element method. The coupling efficiency of 80 % is calculated at the grating period of 380 nm, the duty ratio of 0.75 and the depth of 35–65 nm with top metal reflector.
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Acknowledgments
This research was partially supported by a Grant-in-Aid for Scientific Research (#24760271, #90202837) from the Ministry of Education, Culture, Sports, Science and Technology (MEXT), a MEXT nanotechnology platform 12025014(F-12-IT-0013), and A-STEP feasibility study program (#AS242Z02305J) from the Japan Science and Technology Agency. (JST).
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Li, G., Hashimoto, Y., Maruyama, T. et al. High-efficiency optical coupling to planar photodiode using metal reflector loaded waveguide grating coupler. Opt Quant Electron 45, 657–663 (2013). https://doi.org/10.1007/s11082-013-9674-4
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DOI: https://doi.org/10.1007/s11082-013-9674-4