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Effect of sintering temperature on the structural, optical and electrical properties of sol–gel derived indium oxide thin films

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Abstract

Sol gel derived indium oxide, In2O3; films were prepared by spin coating technique. The films were dried and sintered at different sintering temperatures (300, 400, 450 and 500 °C) in air. The effect of sintering temperature on the structural, optical and electrical properties of In2O3 thin films was studied. The morphology and structure of the films were analyzed by scanning electron microscope and X-ray diffraction. The films showed a bcc structure that changes its 400-preferential orientation to 222 orientation as the sintering temperature increases from 300 to 500 °C. The optical behavior of the films was studied by measuring the transmission spectra in the wavelength range 200–2,500 nm. Different optical models have been proposed for fitting the transmittance data and simulate the optical constants as well as the film thickness of In2O3 films. The best fitting of the data was obtained by combining the classical Drude and OJL models coupled with the Bruggeman effective medium approximation. The optical parameters of Drude model (plasma frequency and damping constant) are used calculate the electrical properties of the films. The calculated values of the electrical sheet resistance were compared with those measured experimentally by four probes. The correlation between the film orientation change and its optical and electrical properties was discussed.

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Acknowledgments

This work was supported by scientific research deanship of Taibah University under the project number 226/429.

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Authors and Affiliations

  1. Physics Department, Taibah University, Almadina, KSA

    A. Solieman

  2. Physics Department, Al-Azhar University, Assiut Branch, Egypt

    A. Solieman

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  1. A. Solieman
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Correspondence to A. Solieman.

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Solieman, A. Effect of sintering temperature on the structural, optical and electrical properties of sol–gel derived indium oxide thin films. J Sol-Gel Sci Technol 60, 48–57 (2011). https://doi.org/10.1007/s10971-011-2549-x

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