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Analysis of depth profiles of 10B and 6Li in Si wafers and lithium ion battery electrodes using the KAERI-NDP system

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Abstract

A neutron depth profiling system has been set-up at HANARO, a 30 MW research reactor at the Korea Atomic Energy Research Institute. Silicon wafers containing 10B or 6Li, and electrode films from lithium ion batteries were irradiated with cold neutrons to test the performance and demonstrate the applications of the system. Depth profiles of 10B and 6Li were determined for each sample. The determined depth profiles were compared with reference values obtained by secondary ion mass spectroscopy. Peak depth, peak concentration, and aerial density agreed with the reference values to within 2, 6, and 11 % respectively.

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Acknowledgments

This work was supported by the National Research Foundation of Korea (NRF). Grant funded by the Korea government (MSIP) (No. 2012M2A2A6004263).

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Authors and Affiliations

  1. Korea Atomic Energy Research Institute, Daedeok-daero 989-111, Yuseong-gu, Daejeon, 34057, South Korea

    B. G. Park & G. M. Sun

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  1. B. G. Park
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  2. G. M. Sun
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Correspondence to B. G. Park.

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Park, B.G., Sun, G.M. Analysis of depth profiles of 10B and 6Li in Si wafers and lithium ion battery electrodes using the KAERI-NDP system. J Radioanal Nucl Chem 307, 1749–1756 (2016). https://doi.org/10.1007/s10967-015-4630-3

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  • DOI: https://doi.org/10.1007/s10967-015-4630-3

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