Skip to main content
SpringerLink
Log in

Thermal investigation of bis(methoxy-β-diketonates) of copper(II) — novel CVD precursors of copper films. Crystal structure of bis(2,2,6,8-tetramethyl-6-methoxynonan-3,5-dionato)copper(II)

  • Published:
Journal of Structural Chemistry Aims and scope Submit manuscript

Abstract

Seven copper(II) bis-chelates derived from novel sterically hindered ligands — methoxy-β-diketones

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. A. S. Zanina, S. I. Shergina, G. I. Khabibulina, et al., Izv. Akad. Nauk SSSR, Ser. Khim., No. 12, 2781–2784 (1977).

    Google Scholar 

  2. P.-L. Pai and C. H. Ting, VLSI Multilevel Interconnection Conf., 6, 258–264 (1989).

    Google Scholar 

  3. B. G. Gribov, G. A. Domrachev, B. V. Zhuk, et al., Deposition of Films and Coatings by Decomposition of Metalorganic Compounds [in Russian], G. A. Razuvaev (ed.), Nauka, Moscow (1981).

    Google Scholar 

  4. I. K. Igumenov, Yu. V. Chumachenko, and S. V. Zemskov, Challenges in Chemistry and Applications of Volatile Metal β-diketonates [in Russian],: Nauka, Moscow (1982), pp. 100–120.

    Google Scholar 

  5. V. N. Vetroprakhov and S. A. Krupoder, Usp. Khim., 69, No. 12, 1149–1177 (2000).

    Google Scholar 

  6. J. E. Parmeter, G. A. Peterssen, P. M. Smith, et al., J. Vac. Sci. Technol., B13, No. 1, 130–136 (1995).

    Google Scholar 

  7. A. S. Zanina, S. I. Shergina, I. E. Sokolov, et al., Sib. Khim. Zh., No. 4, 69–73 (1991).

  8. V. Suk, M. Malat, and A. Jenicova, Chem. List., 48, 1511 (1954); Collection Czechoslov. Chem. Commun., 20, 158 (1955).

    CAS  Google Scholar 

  9. V. M. Grankin and P. P. Semyannikov, Pribor. Tekhn. Eksp., No. 4, 129–132 (1991).

  10. P. P. Semyannikov, I. K. Igumenov, S. V. Trubin, and I. P. Asanov, J. Phys. IV France, 11, Pr3-995 (2001).

    Google Scholar 

  11. G. M. Sheldrick, SHELX-97, Release 97-1, Univ. Göttingen, Germany (1997).

    Google Scholar 

  12. S. A. Gromilov and I. A. Baidina, Zh. Strukt. Khim., 45, No. 6, 1076–1127 (2004).

    Google Scholar 

  13. V. V. Bakovets, N. V. Gel’fond, V. N. Mitkin, et al., J. Phys. IV France, 11, Pr3-561–Pr3-567 (2001).

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. A. V. Nikolaev Institute of Inorganic Chemistry, Siberian Division, Russian Academy of Sciences, Novosibirsk

    T. I. Liskovskaya, P. P. Semyannikov, I. A. Baidina, P. A. Stabnikov, N. V. Pervukhina, V. A. Logvinenko & I. K. Igumenov

  2. Institute of Chemical Kinetics and Combustion, Siberian Division, Russian Academy of Sciences, Novosibirsk

    I. E. Sokolov

Authors
  1. T. I. Liskovskaya
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. P. P. Semyannikov
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. I. A. Baidina
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. P. A. Stabnikov
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. N. V. Pervukhina
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. V. A. Logvinenko
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. I. K. Igumenov
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. I. E. Sokolov
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

Original Russian Text Copyright © 2006 by T. I. Liskovskaya, P. P. Semyannikov, I. A. Baidina, P. A. Stabnikov, N. V. Pervukhina, V. A. Logvinenko, I. K. Igumenov, and I. E. Sokolov

__________

Translated from Zhurnal Strukturnoi Khimii, Vol. 47, No.4, pp.741–748, July–August, 2006.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Liskovskaya, T.I., Semyannikov, P.P., Baidina, I.A. et al. Thermal investigation of bis(methoxy-β-diketonates) of copper(II) — novel CVD precursors of copper films. Crystal structure of bis(2,2,6,8-tetramethyl-6-methoxynonan-3,5-dionato)copper(II). J Struct Chem 47, 726–734 (2006). https://doi.org/10.1007/s10947-006-0361-1

Download citation

  • Received:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10947-006-0361-1

Keywords

Search

Navigation