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Advances in Fabrication of TES μ-Calorimeter Arrays and Associated Filter Structures for AC-Biased Read Out

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Abstract

In this paper we describe microfabrication developments for a 1024 pixel calorimeter array, to be used in future X-ray spectroscopic space missions. We report on an optimization study of high packing factor, mushroom shaped, Cu/Bi absorbers, for which a sputter deposition technique into a new type of photoresist mould has been developed. We have fabricated a prototype 32×32 array where 98 representable pixels are potentially functioning TESs. To gain more control on the detector pixel performance a new procedure was developed to couple absorber and thermometer, utilizing a thin insulating layer. Advances are reported in the fabrication of superconducting LC resonating circuits, needed for frequency domain multiplexed read out. A quality factor Q∼4000 @ 2.6 MHz has been measured, which was limited by critical current in the circuit.

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Authors and Affiliations

  1. SRON Netherlands Institute for Space Research, Sorbonnelaan 2, 3584 CA, Utrecht, The Netherlands

    M. P. Bruijn, M. L. Ridder, L. Gottardi, H. F. C. Hoevers, P. A. J. de Korte & J. van der Kuur

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  1. M. P. Bruijn
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  2. M. L. Ridder
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  3. L. Gottardi
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  4. H. F. C. Hoevers
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  5. P. A. J. de Korte
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  6. J. van der Kuur
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Correspondence to M. P. Bruijn.

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Bruijn, M.P., Ridder, M.L., Gottardi, L. et al. Advances in Fabrication of TES μ-Calorimeter Arrays and Associated Filter Structures for AC-Biased Read Out. J Low Temp Phys 151, 500–505 (2008). https://doi.org/10.1007/s10909-007-9681-6

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  • DOI: https://doi.org/10.1007/s10909-007-9681-6

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